Infrared and Laser Engineering, Volume. 32, Issue 6, 651(2003)
Etching study of micro-cavity with flexible film of novel infrared detector
Pneumatic infrared detector based on gas direct absorption and MEMS technology is a novel infrared detector for mid-far band uncooled infrared detection. Etching study of the key structure,micro-gas-cell and flexible film, is of great importance to device fabrication. Etching requirements for those structures are given and optimal EPW wet etching condition and speed are obtained through experiments, which insure controllability and good quality of device structure.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Etching study of micro-cavity with flexible film of novel infrared detector[J]. Infrared and Laser Engineering, 2003, 32(6): 651