Infrared and Laser Engineering, Volume. 44, Issue 2, 625(2015)
Ultraviolet scanning linewidth measuring system
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Zhang Mingkai, Gao Sitian, Lu Rongsheng, Li Wei, Li Qi, Qian Xiaoli. Ultraviolet scanning linewidth measuring system[J]. Infrared and Laser Engineering, 2015, 44(2): 625