Journal of Infrared and Millimeter Waves, Volume. 42, Issue 1, 8(2023)

Studies on the surface treatment of InAs/GaSb type-II super-lattice long-wave infrared detectors

Yu-Rong CUI1,2, Yi ZHOU1,2,3、*, Min HUANG1, Fang-Fang WANG1, Zhi-Cheng XU1, Jia-Jia XU1, Jian-Xin CHEN1,2,3、**, and Li HE1
Author Affiliations
  • 1Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 2University of Chinese Academy of Science,Beijing 100049,China
  • 3Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China
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    Figures & Tables(10)
    Schematic diagrams of InAs/GaSb superlattice detectors:(a)conventional structure device,(b)gate-‍controlled structure device
    I-V curve of varying area devices with(a)no treatment without annealing,(b)N2O treatment without annealing,(c)N2O treatment with annealing,and(d)pixels with a diameter of 200μm for samples No.1,No.2,and No.3
    Relationship between R0A-1 and P/A of varying area device
    The leakage current on the sidewall surface of samples No. 1 and No. 3(the ordinate of the main graph is a linear coordinate,and the ordinate of the upper right graph is a logarithmic coordinate)
    I-V curves under different gate voltages(a)Sample No. 1,(b)Sample No. 3
    Simulation of side-wall leakage current under 0 gate voltage(a)Sample No. 1,(b)Sample No. 3(the ordinate of the main picture is logarithmic coordinates,and the ordinate of the lower left picture is linear coordinates)
    • Table 1. List of devices

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      Table 1. List of devices

      编号N2O处理退火处理器件结构
      第一组1200-500 μm VADA
      23 min200-500 μm VADA
      33 min250℃200-500 μm VADA
      第二组1-GD400 μm GD
      3-GD3 min250℃400μm GD
    • Table 2. Surface resistivities obtained by simulation

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      Table 2. Surface resistivities obtained by simulation

      参数1号2号3号
      r0surface17.7 Ωcm64.1 Ωcm284.4 Ωcm
    • Table 3. Parts of parameters used in the dark current simulation

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      Table 3. Parts of parameters used in the dark current simulation

      参数数值参数数值
      me0.03 m0M2∙me1×10-23∙m0(eV2∙cm3
      mh0.4 m0τgr1.5 ns
      μe1 000(cm2/Vs)Et0.03 eV
      μh100(cm2/Vs)Nt2×1015/cm3
    • Table 4. Surface parallel resistivities and surface charges obtained by simulation

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      Table 4. Surface parallel resistivities and surface charges obtained by simulation

      参数1号3号
      rsurface17.9 Ωcm297.6 Ωcm
      Neff6.2×1016/ cm39.6×1016/ cm3
      Qs2.33×1011 cm-23.72×1011 cm-2
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    Yu-Rong CUI, Yi ZHOU, Min HUANG, Fang-Fang WANG, Zhi-Cheng XU, Jia-Jia XU, Jian-Xin CHEN, Li HE. Studies on the surface treatment of InAs/GaSb type-II super-lattice long-wave infrared detectors[J]. Journal of Infrared and Millimeter Waves, 2023, 42(1): 8

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    Paper Information

    Category: Research Articles

    Received: Feb. 24, 2021

    Accepted: --

    Published Online: Feb. 23, 2023

    The Author Email: ZHOU Yi (zhouyi@mail.sitp.ac.cn), CHEN Jian-Xin (jianxinchen@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2023.01.002

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