[1] [1] J S Burdess,A J Harris,D Wood,et al.A system for dynamic characterization of microstructures[J].J.Microelectromech.Syst,1997,6(4):322-328.

[2] [2] M R Hart,R A Conant,K Y Lau,et al.Stroboscopic interferometer system for dynamic MEMS characterization[J].J.Microelectromech.Syst,2000,9(4):409-418.

[3] [3] G F LaVigne,S L Miller.A performance analysis system for MEMS using automated imaging methods[R].NM,USA:Research report of Sandia National Laboratory,2000.

[4] [4] C Q Davis,D M Freeman.Using a light microscope to measure motions with nanometer accuracy[J].Opt.Eng,1998,37:1299-1304.

[5] [5] D J Burns,H F Helbig.A system for automatic electrical and optical characterization of microelectromechanical devices[J].J.Microelectromech.Syst,1999,8(4):473-482.

[6] [6] G Fornaro,G Franceschetti,R Lanari,et al.Robust phase-unwrapping techniques:a comparison[J].Opt.Soc.Am.A,1996,13(12):2355-2366.

[7] [7] W C Tang,C H Nguyen,M W Judy,et al.Eletrostatic-comb drive for lateral polysilicon resonators[J].Sensors & Actuators A,1990,21(2):328-331.