Acta Photonica Sinica, Volume. 43, Issue 7, 722002(2014)

A Method to Evaluate the Error Restraint Ability of CCOS Process

WANG Jia1,2、*, FAN Bin1, WAN Yongjian1, SHI Chunyan1, and ZHUO Bin1
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

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    WANG Jia, FAN Bin, WAN Yongjian, SHI Chunyan, ZHUO Bin. A Method to Evaluate the Error Restraint Ability of CCOS Process[J]. Acta Photonica Sinica, 2014, 43(7): 722002

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    Paper Information

    Received: Oct. 15, 2013

    Accepted: --

    Published Online: Aug. 18, 2014

    The Author Email: Jia WANG (wangj062778@qq.com)

    DOI:

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