Acta Photonica Sinica, Volume. 43, Issue 7, 722002(2014)
A Method to Evaluate the Error Restraint Ability of CCOS Process
Base on the convolution model of material removal and power spectral density function in optical manufacturing, a mathematical model named smoothing spectral function was established. A Zerodur plate mirror with diameter of 620 mm was polished using Rigid Conformal tool. By calculating the smoothing spectral curve, the error restraint ability of polishing process can be expressed as a normalized and nondimensional spectral curve. The calculated result indicates that the error restraint ability of polishing process can be evaluated by the value of smoothing spectral function curve.
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WANG Jia, FAN Bin, WAN Yongjian, SHI Chunyan, ZHUO Bin. A Method to Evaluate the Error Restraint Ability of CCOS Process[J]. Acta Photonica Sinica, 2014, 43(7): 722002
Received: Oct. 15, 2013
Accepted: --
Published Online: Aug. 18, 2014
The Author Email: Jia WANG (wangj062778@qq.com)
CSTR:32186.14.