Acta Optica Sinica, Volume. 33, Issue 2, 231003(2013)
Microstructure and Luminous Property of Multilayer SiNx/Si/SiNx Thin Films
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Lin Juan, Yang Peizhi, Hua Qilin. Microstructure and Luminous Property of Multilayer SiNx/Si/SiNx Thin Films[J]. Acta Optica Sinica, 2013, 33(2): 231003
Category: Thin Films
Received: Aug. 3, 2012
Accepted: --
Published Online: Dec. 31, 2012
The Author Email: Juan Lin (linjuanlinjuan@126.com)