Optics and Precision Engineering, Volume. 16, Issue 5, 856(2008)

Modeling of dynamic nonlinear piezo-actuated electromechanical coupling dynamic system and its wideband high precision displacement control

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    References(18)

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    [in Chinese], [in Chinese]. Modeling of dynamic nonlinear piezo-actuated electromechanical coupling dynamic system and its wideband high precision displacement control[J]. Optics and Precision Engineering, 2008, 16(5): 856

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    Received: Oct. 10, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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