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INFRARED, Volume. 41, Issue 6, 7(2020)

Study on Surface Treatment Method of InSb Focal Plane Device After Backside Thinning

Yu XIAO, Jia-fa LI, Shu-yan WANG, Ling-xia CAO, and Hai-yan LI
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    XIAO Yu, LI Jia-fa, WANG Shu-yan, CAO Ling-xia, LI Hai-yan. Study on Surface Treatment Method of InSb Focal Plane Device After Backside Thinning[J]. INFRARED, 2020, 41(6): 7

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    Received: Jun. 16, 2020

    Accepted: --

    Published Online: Nov. 9, 2020

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2020.06.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology