Acta Photonica Sinica, Volume. 31, Issue 5, 592(2002)
LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. LASER-INTERFEROMETRIC MULTICOORDINATE NANOPOSITIONING SYSTEM[J]. Acta Photonica Sinica, 2002, 31(5): 592