Design and analysis of a MEMS horizontal torsion micro mirror with folded springs

[in Chinese]; [in Chinese]

Optics and Precision Engineering, Volume. 13, Issue z1, 81(2005)

[in Chinese] and [in Chinese]

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[in Chinese]

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References(4)

[3] [3] XIAO Z X,WU X T,PENG W Y,et al.Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending[J].Journal of Micro Electromechanical Systems,2003,12(6):929-935.

[6] [6] XIAO Z X,WU X T,PENG W Y,et al.An angle-based design approach for rectangular electrostatic torsion actuators[J].Journal of Micro Electromechanical Systems,2001,10(4):561-567.

[7] [7] TOSHIYOSHI H,FUJITA H.Electrostatic micro torsion mirrors for an optical switch matrix[J].Micro Electromechanical System,1998,5(4):232-237.

[8] [8] DUNG G,SU J.Optical scanner realized by surface micromachined vertical torsion mirror[J].IEEE Potonics Technology Letter,1999,11(5):587-589.

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[in Chinese], [in Chinese]. Design and analysis of a MEMS horizontal torsion micro mirror with folded springs[J]. Optics and Precision Engineering, 2005, 13(z1): 81

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