Acta Optica Sinica, Volume. 44, Issue 8, 0813001(2024)

1×8 Silicon-Based Thermo-Optic Switch Based on Mach-Zehnder Interferometers

Xiaoyong Gao1, Yangyang Liu1,2, Guangxi Hu1, Liangjun Lu2、*, and Haimei Luo1、**
Author Affiliations
  • 1Key Laboratory of Optoelectronics and Telecommunication of Jiangxi Province, Jiangxi Normal University, Nanchang 330022, Jiangxi , China
  • 2Pinghu Institute of Intelligent Optoelectronics, Shanghai Jiao Tong University, Pinghu314200, Zhejiang , China
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    Figures & Tables(14)
    Schematic of 1×8 optical switch architecture based on tree structure
    Schematic of the structure of 1×2 MZI
    Transmission spectra of different paths, the insets show the electric field distribution of MMI. (a) Transmission spectra of paths 1-2 and 1-3 of 1×2 MMI; (b) transmission spectra of paths 1-3 and 1-4 of 2×2 MMI
    Simulation results of phase variation with input power,the insets show the cross section of thermally shifted phase arm and thermal field simulation results, respectively
    Physical diagrams of optical switch after electrical and optical encapsulation. (a) Gold wire bonding diagram of optical switch chip; (b) packaged optical switch; (c) PCB diagram; (d) substrate structure; (e) physical diagram of optical switch
    External driver for optical switch chip. (a) Physical multi-channel voltage source; (b) connection plate
    Optical switch calibration test system
    Spectra of eight transmission paths and test waveguide for optical switch. (a) Test waveguide; (b) I1-O1; (c) I1-O2; (d) I1-O3; (e) I1-O4; (f) I1-O5; (g) I1-O6; (h) I1-O7; (i) I1-O8
    Transmission spectra for power maximization at target output port of optical switch. (a) I1-O1; (b) I1-O2; (c) I1-O3; (d) I1-O4; (e) I1-O5; (f) I1-O6; (g) I1-O7; (h) I1-O8
    Response time test system of 1×8 TO switch
    Test results of response time of optical switch. (a) 100 Hz; (b) 1 kHz; (c) 5 kHz; (d) 10 kHz
    • Table 1. Power consumption of each phase shifter for all paths

      View table

      Table 1. Power consumption of each phase shifter for all paths

      Switch pathPower consumption of S1 /mWPower consumption of S2 /mWPower consumption of S3 /mW
      I1-O13.0212.749.27
      I1-O23.0212.7412.83
      I1-O33.029.799.11
      I1-O43.029.7913.27
      I1-O520.1214.2312.39
      I1-O620.1214.2310.88
      I1-O720.128.1711.96
      I1-O820.128.1710.64
    • Table 2. Response time test results of thermal phase shifters for optical switch

      View table

      Table 2. Response time test results of thermal phase shifters for optical switch

      Phase shifterSquare-wave frequency /kHzRising edge averaging time /μsFalling edge averaging time /μs
      S3-SE10.140.5560.00
      S3-SE31.012.4034.00
      S3-SE55.012.6528.98
      S3-SE710.011.8922.51
    • Table 3. Comparison of reported TO switching performance

      View table

      Table 3. Comparison of reported TO switching performance

      TechnologyPort countInsertionloss /dBCrosstalk /dBResponsetime /μsPower consumption /mW

      Footprint /

      (mm×mm)

      Ref.
      MZI, direct carrier injection2×21-0.422.60.003×0.006[9]
      MZI, WG heater+n-i-n16×165.2~(-30)21.78515+9137×3.6[13]
      MZI, TiN32×32~15.8-2030293011×25[14]
      D-R reso-nators,Ti4×417.8-13.6∼3000-3.472×2.425[24]
      Proposed MZI, TiN1×8~1.1<(-23.6)60~34.091.75×3
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    Xiaoyong Gao, Yangyang Liu, Guangxi Hu, Liangjun Lu, Haimei Luo. 1×8 Silicon-Based Thermo-Optic Switch Based on Mach-Zehnder Interferometers[J]. Acta Optica Sinica, 2024, 44(8): 0813001

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    Paper Information

    Category: Integrated Optics

    Received: Nov. 13, 2023

    Accepted: Jan. 22, 2024

    Published Online: Apr. 18, 2024

    The Author Email: Lu Liangjun (jxsdhm@jxnu.edu.cn), Luo Haimei (luliangjun@sjtu.edu.cn)

    DOI:10.3788/AOS231782

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