Infrared and Laser Engineering, Volume. 52, Issue 12, 20230288(2023)

Linear constraint approach for calibrating distance of base point in laser tracking interferometer system

Xiangzhang Chao1, Xiaofei Diao1, Yanhui Kang1, Xinrui Fan2, Lihua Lei3, and Liqin Liu3
Author Affiliations
  • 1Division of Dimensional Metrology, National Institute of Metrology, Beijing 100029, China
  • 2Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
  • 3Shanghai Key Laboratory of Online Test and Control Technology, Shanghai 201203, China
  • show less
    Figures & Tables(10)
    Measurement scheme of robot calibration
    DBP calibration method based on linear constraint
    Calibration error in different values of L/d
    Influence of LTIS position on calibration error
    Experimental system of DBP calibration
    (a) Air refractive index compensation; (b) The verification experimental system of calibration; (c) API tracker
    • Table 1. Simulation environment and parameters set

      View table
      View in Article

      Table 1. Simulation environment and parameters set

      ItemsParameter
      EnvironmentIntel i5 7th Gen
      Distance of base point (DBP)350 mm
      Error of interferometerX-N (0, 0.5 μm)
      Error of LTISX-N (0, 0.5 μm)
    • Table 2. DBP calibration result for LTIS

      View table
      View in Article

      Table 2. DBP calibration result for LTIS

      No.DBP/mmAverage x0/mm Average l0/mm
      1290.06881492.0213290.0764
      2290.0857
      3290.0748
      4290.0652
      5290.0877
    • Table 3. Weight average and its standard deviation of DBP

      View table
      View in Article

      Table 3. Weight average and its standard deviation of DBP

      12345
      $ \sigma_{\|} $0.05020.11280.05110.05590.0473
      $ p_{i} $397.578.666382.44319.62446.27
      $ \bar{l}_{0} $29.0764 mm
      $ \sigma_{T_{1}} $4.4 μm
    • Table 4. DBP calibration results for API radian

      View table
      View in Article

      Table 4. DBP calibration results for API radian

      No.DBP/mmWeighted average /mm API value/mmError /mm
      1154.2002154.1940154.19100.003
      2154.1892
      3154.1993
      4154.1868
      5154.1968
    Tools

    Get Citation

    Copy Citation Text

    Xiangzhang Chao, Xiaofei Diao, Yanhui Kang, Xinrui Fan, Lihua Lei, Liqin Liu. Linear constraint approach for calibrating distance of base point in laser tracking interferometer system[J]. Infrared and Laser Engineering, 2023, 52(12): 20230288

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: May. 7, 2023

    Accepted: Jul. 3, 2023

    Published Online: Feb. 23, 2024

    The Author Email:

    DOI:10.3788/IRLA20230288

    Topics