Laser & Optoelectronics Progress, Volume. 53, Issue 5, 51203(2016)
Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers
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Le Yanfen, Ju Aisong. Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers[J]. Laser & Optoelectronics Progress, 2016, 53(5): 51203
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Nov. 18, 2015
Accepted: --
Published Online: May. 5, 2016
The Author Email: Yanfen Le (leyanfen@usst.edu.cn)
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