Laser & Optoelectronics Progress, Volume. 53, Issue 5, 51203(2016)
Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers
The nonlinear errors theory in heterodyne interferometer is summarized, in which the formation mechanism, size and expressive form of first-order and second-order nonlinear errors are analyzed emphatically. The research progress of nonlinear error detection and compensation method is elaborated in detail, and the application characteristics of various methods are pointed out. It provides a theoretical foundation for further research on the nonlinearity to improve the accuracy of heterodyne interferometer.
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Le Yanfen, Ju Aisong. Analysis and Measurement of the Nonlinear Errors in Heterodyne Interferometers[J]. Laser & Optoelectronics Progress, 2016, 53(5): 51203
Category: Instrumentation, Measurement and Metrology
Received: Nov. 18, 2015
Accepted: --
Published Online: May. 5, 2016
The Author Email: Yanfen Le (leyanfen@usst.edu.cn)