Infrared and Laser Engineering, Volume. 44, Issue S, 183(2015)

Large optical coatings fabricated by ion assisted technology

Ai Wanjun* and Xiong Shengming
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    References(12)

    [1] [1] James J McNally, Ghanim A Al-Jumaily, John R McNeil, et al. Ion assisted deposition of optical and protective coatings for heavy metal fluoride glass [J]. Applied Optics, 1986, 25(12): 1973-1976.

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    [3] [3] Hansjorg N, Sven L, Michael K, et al. Ion-assisted deposition of oxide materials at room temperature by use of different ion sources[J]. Applied Optics, 1999, 38(16): 3610-3613.

    [4] [4] Woo Seouk-Hoon, Chang Kwon Hwangbo. Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition [J]. Applied Optics, 2006, 45(7): 1447-1455.

    [6] [6] Culver T R, Pawlewicz W T, Zachistal J H, et al. developments in ion assisted multilayer coatings [C]//SPIE, 1993, 1848: 192-199.

    [7] [7] Michael L Fulton. Approaches explored for producing a variety of ion-assisted-deposited thin-film coatings using an end-Hall ion source [C]//SPIE, 1996, 2776: 114-125.

    [8] [8] Michael L Fulton. Application of ion-assisted-deposition using a gridless end-Hall ion source for volume manufacturing of thin-film optical filters [C]//SPIE, 1994, 2253: 374-393.

    [9] [9] Walter T P, Thomas R C, John H Z. Ion assisted evaporative coating of 2-meter optics[C]//SPIE, 1992, 1618: 2-13.

    [10] [10] Walter T P, Thomas R C, Chiello M W, et al. Low-energy high-flux reactive ion assisted deposition of oxide optical coatings: performance, durability, stability and scalability[C]//SPIE, 1994, 2262: 2-13.

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    Ai Wanjun, Xiong Shengming. Large optical coatings fabricated by ion assisted technology[J]. Infrared and Laser Engineering, 2015, 44(S): 183

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    Paper Information

    Category: 光电器件与材料

    Received: Nov. 5, 2015

    Accepted: Dec. 3, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Wanjun Ai (awj422177370@163.com)

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