Infrared and Laser Engineering, Volume. 44, Issue S, 183(2015)

Large optical coatings fabricated by ion assisted technology

Ai Wanjun* and Xiong Shengming
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  • [in Chinese]
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    Optical coatings were fabricated by ion assisted deposition technology based on the largest platform of ZZS3600 high vacuum coating machine. Properties of the deposited films as well as thickness uniformity were researched. The familiar optics as Ta2O5 and SiO2 were produced by the ion bombardment of MARK Ⅱ ion sources. Several properties related with the optical coatings were analyzed. It suggests that great improvement achieved of the coating structure and properties of the deposited coatings under the condition that the distance between the substrate and the evaporation sources are extremely large. Based on the geometric configurations of the platform, the coating uniformity research of planetary system and single axis coating system were performed, respectively. The thickness nonuniformity is better than 0.4% without mask under the planetary system. As for single axis system, the thickness nonuniformity can be obtained less than 0.6%. High-quality large optical coatings can be acquired with the aid of double ion sources.

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    Ai Wanjun, Xiong Shengming. Large optical coatings fabricated by ion assisted technology[J]. Infrared and Laser Engineering, 2015, 44(S): 183

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    Paper Information

    Category: 光电器件与材料

    Received: Nov. 5, 2015

    Accepted: Dec. 3, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Wanjun Ai (awj422177370@163.com)

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