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Laser & Optoelectronics Progress, Volume. 47, Issue 5, 53101(2010)

Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path

Ren Hao*, Wang Qiaobin, Luo Yuqiang, and Li Kangye
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    Ren Hao, Wang Qiaobin, Luo Yuqiang, Li Kangye. Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path[J]. Laser & Optoelectronics Progress, 2010, 47(5): 53101

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    Paper Information

    Category: Thin Films

    Received: Sep. 18, 2009

    Accepted: --

    Published Online: Sep. 15, 2010

    The Author Email: Hao Ren (r_h@tom.com)

    DOI:10.3788/lop47.053101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology