Laser & Optoelectronics Progress, Volume. 47, Issue 5, 53101(2010)

Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path

Ren Hao*, Wang Qiaobin, Luo Yuqiang, and Li Kangye
Author Affiliations
  • [in Chinese]
  • show less

    A wide-band spectrum optical film thickness monitoring system with compound light path is introduced. The structure,components and working principles of the system are analyzed. The monitoring system is developed by increasing a piece of spectroscope with aperture to form compound light path,and wide-band spectrum monitoring software based on LabVIEW. Methods of wide-band spectrum optical film thickness monitoring based spectrum scanning method and optical film thickness monitoring based on extremum method are compatible. The accuracy and automatization of optical film thickness monitoring can be improved also. This monitoring system can be used in upgrade or reconstruction of optical coating devices.

    Tools

    Get Citation

    Copy Citation Text

    Ren Hao, Wang Qiaobin, Luo Yuqiang, Li Kangye. Wide-Band Spectrum Optical Film Thickness Monitoring System with Compound Light Path[J]. Laser & Optoelectronics Progress, 2010, 47(5): 53101

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Sep. 18, 2009

    Accepted: --

    Published Online: Sep. 15, 2010

    The Author Email: Hao Ren (r_h@tom.com)

    DOI:10.3788/lop47.053101

    Topics