Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method

Dongping Zhang; Meiqiong Zhan; Ming Fang; Hongbo He; Jianda Shao; Zhengxiu Fan

Chinese Optics Letters, Volume. 2, Issue 6, 06364(2004)

Dongping Zhang^1,2、*, Meiqiong Zhan^1,2, Ming Fang^1,2, Hongbo He^1,2, Jianda Shao^1,2, and Zhengxiu Fan^1,2

¹R&

²D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

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Dongping Zhang, Meiqiong Zhan, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan, "Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method," Chin.Opt.Lett. 2, 06364 (2004)

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Paper Information

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Received: Jan. 8, 2004

Accepted: --

Published Online: Jun. 6, 2006

The Author Email: Dongping Zhang (zdp@mail.siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology