Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method

Dongping Zhang; Meiqiong Zhan; Ming Fang; Hongbo He; Jianda Shao; Zhengxiu Fan

Chinese Optics Letters, Volume. 2, Issue 6, 06364(2004)

Dongping Zhang^1,2、*, Meiqiong Zhan^1,2, Ming Fang^1,2, Hongbo He^1,2, Jianda Shao^1,2, and Zhengxiu Fan^1,2

¹R&

²D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800

show less

Cited By

Article index updated: Jun. 15, 2024

The article is cited by 1 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Dongping Zhang, Meiqiong Zhan, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan. Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method[J]. Chinese Optics Letters, 2004, 2(6): 06364

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category:

Received: Jan. 8, 2004

Accepted: --

Published Online: Jun. 6, 2006

The Author Email: Dongping Zhang (zdp@mail.siom.ac.cn)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology