Chinese Optics Letters, Volume. 2, Issue 6, 06364(2004)

Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method

Dongping Zhang1,2、*, Meiqiong Zhan1,2, Ming Fang1,2, Hongbo He1,2, Jianda Shao1,2, and Zhengxiu Fan1,2
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  • 1R&
  • 2D Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    Dongping Zhang, Meiqiong Zhan, Ming Fang, Hongbo He, Jianda Shao, Zhengxiu Fan. Influence of deposition rate on the properties of ZrO2 thin films prepared in electron beam evaporation method[J]. Chinese Optics Letters, 2004, 2(6): 06364

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    Paper Information

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    Received: Jan. 8, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Dongping Zhang (zdp@mail.siom.ac.cn)

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