Optics and Precision Engineering, Volume. 17, Issue 8, 1964(2009)
Control of membrane mirror shape by single electrode
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AN Yuan, JIN Guang, QI Ying-chun, SUN Xiao-wei, JIANG Ning, AI Chen-guang. Control of membrane mirror shape by single electrode[J]. Optics and Precision Engineering, 2009, 17(8): 1964
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Received: Jan. 19, 2009
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Yuan AN (any@ciomp.ac.cn)
CSTR:32186.14.