Optics and Precision Engineering, Volume. 17, Issue 8, 1964(2009)
Control of membrane mirror shape by single electrode
Electrostatic stretching is a new technique developed in recent years for fabricating membrane mirrors with light,good flexible and collapsible properties.Based on the electrostatic shaping principle of a membrane mirror,the force field of the stretched membrane was calculated by a single electrode mode,and the support structure of the membrane and its control circuit were designed.Then,several kind of technological parameters for controlling membrane shape were given and the focus of reflective surface of the membrane was measured by a knife-edge.The experimental results show that the PV and RMS values of the membrane mirror are 11.14λ and 1.86λ without applying an electric force respectively,and the focus of reflective surface of the membrane is about 2.1 m with a 10 000 V high voltage.Finally,the Zernike fitting was used to verify the reliability of the data, and it suggests that the surface accuracy can be improved further by optimizing the holding structure and selecting excellent membrane materials.
Get Citation
Copy Citation Text
AN Yuan, JIN Guang, QI Ying-chun, SUN Xiao-wei, JIANG Ning, AI Chen-guang. Control of membrane mirror shape by single electrode[J]. Optics and Precision Engineering, 2009, 17(8): 1964
Category:
Received: Jan. 19, 2009
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Yuan AN (any@ciomp.ac.cn)
CSTR:32186.14.