Laser & Optoelectronics Progress, Volume. 54, Issue 4, 41204(2017)
Maximum Likelihood Estimation Method to Eliminate Supporting Error in Subaperture Stitching Interferometry
[1] [1] Chen Haiping, Xiong Zhao, Cao Tingfen, et al. Research on surface measure device for process of large aperture mirror assembly[J]. Acta Optica Sinica, 2016, 36(2): 0212002.
[2] [2] Shi Tu, Zang Zhongming, Liu Dong, et al. Retrace error correction for non-null testing of optical aspheric surface[J]. Acta Optica Sinica, 2016, 36(8): 0812006.
[3] [3] Li Yong, Tang Feng, Lu Yunjun, et al. A method for reducing the error accumulation in sub-aperture stitching interferometer for flat optics[J]. Chinese J Lasers, 2015, 42(7): 0708006.
[4] [4] Wang Ping, Tian Wei, Wang Rudong, et al. Rotating chuck test for removing chuck error of optical surface[J]. Acta Optica Sinica, 2011, 31(8): 0812004.
[5] [5] Greco V, Tronconi R, Vecchio C D, et al. Absolute measurement of planarity with Fritz′s method: uncertainty evaluation[J]. Applied Optics, 1999, 38(10): 2018-2027.
[6] [6] Shariharan P. Interferometric testing of optical surfaces: absolute measurements offlatness[J]. Optical Engineering, 1997, 36(9): 2478-2481.
[7] [7] Evans C J, Kestner R N. Test optics errorremoval[J]. Applied Optics, 1996, 35(7): 1015-1021.
[8] [8] Song Weihong, Wu Fan, Hou Xi, et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. Optical Engineering, 2013, 52(3): 033601.
[9] [9] Seitz G, Otto W. Method for the interferometer measurement of non-rotationally symmetric wavefront errors: US, 7277186[P]. 2007-10-02.
[10] [10] Otto W. Method for the interferometric measurement of non-rotationally symmetric wavefront errors: US, 6839143[P]. 2005-01-04.
[11] [11] Griesmann U. Three-flat test solutions based on simple mirror symmetry[J]. Applied Optics, 2006, 45(23): 5856-5865.
[12] [12] Zhang Min, Sui Yongxin, Yang Huaijiang. Mechanical error compensation algorithm for subaperture stitching interferometry[J]. Optics and Precision Engineering, 2015, 23(4): 22-28.
Get Citation
Copy Citation Text
Zhang Min, Gao Songtao, Miao Erlong, Sui Yongxin, Yang Huaijiang. Maximum Likelihood Estimation Method to Eliminate Supporting Error in Subaperture Stitching Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(4): 41204
Category: Instrumentation, Measurement and Metrology
Received: Sep. 12, 2016
Accepted: --
Published Online: Apr. 19, 2017
The Author Email: Min Zhang (zhangminxiaowei@163.com)