Chinese Optics Letters, Volume. 7, Issue 8, 08738(2009)

Influence of interface roughness on reflectivity of tungsten/boron-carbide multilayers with variable bi-layer number by X-ray reflection and diffuse scattering

Min Dai1,2, Zhong Zhang1, Jingtao Zhu1, Xiaoqiang Wang1, Jing Xu1, Xiuhua Fu2, Liang Bai1, Qiushi Huang1, Zhanshan Wang1, and Lingyan Chen1
Author Affiliations
  • 1Institute of Precision Optical Engineering, Department of Physics, Tongji University, Shanghai 200092, China
  • 2Department of Physics, Changchun University of Science and Technology, Changchun 130022, China
  • show less

    Influence of interface roughness on the reflectivity of Tungsten/boron-carbide (W/B4C) multilayers varying with bi-layer number, N, is investigated. For W/B4C multilayers with the same design period thickness of 2.5 nm, a real-structure model is used to calculate the variation of reflectivities with N=50, 100, 150, and 200, respectively. Then, these multilayers are fabricated by a direct current (DC) magnetron sputtering system. Their reflectivity and scattering intensity are measured by an X-ray diffractometer (XRD) working at Cu K\alpha line. The X-ray reflectivity measurement indicates that the reflectivity is a function of its bi-layer number. The X-ray scattering measured results show that the interface roughness of W/B4C multilayers increases slightly from layer to layer during multilayer growing. The variation of the reflectivity and interface roughness with bi-layer number is accurately explained by the presented real-structure model.

    Tools

    Get Citation

    Copy Citation Text

    Min Dai, Zhong Zhang, Jingtao Zhu, Xiaoqiang Wang, Jing Xu, Xiuhua Fu, Liang Bai, Qiushi Huang, Zhanshan Wang, Lingyan Chen. Influence of interface roughness on reflectivity of tungsten/boron-carbide multilayers with variable bi-layer number by X-ray reflection and diffuse scattering[J]. Chinese Optics Letters, 2009, 7(8): 08738

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Nov. 5, 2008

    Accepted: --

    Published Online: Aug. 17, 2009

    The Author Email:

    DOI:10.3788/COL20090708.0738

    Topics