Spatial mismatch calibration method for simultaneous slightly off-axis digital holographic microscopy system

Fig. 7. Simulation results. (a) RMSE convergence curve of phase distribution based on LDW-PSO; (b) The whole phase difference distribution after calibration using the method proposed in this paper; (c) The whole phase difference distribution after calibration using PPC method

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Fig. 8. Holograms collected by the experimental system. (a) The off-axis hologram without sample; (b) The slightly off-axis holograms with sample

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Fig. 9. Profile of the sample measured by the profilometer

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Fig. 10. Experimental results. (a) The RMSE convergence curve of phase distribution based on LDW-PSO; (b) The entire phase difference distribution after calibration; (c) The phase distribution of reconstructed sample; (d) The outline of the white line marked in Figure 10(c)

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Table 1. Zernike polynomials of ZEMAX type and their coefficients in the simulation
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Table 1. Zernike polynomials of ZEMAX type and their coefficients in the simulation
阶数多项式系数
$1$ $2 x$ $- 9 \times 10^{- 3}$
$2$ $2 y$ $600$
$3$ $\sqrt{3} (2 x^{2} + 2 y^{2} - 1)$ $3.6 \times 10^{6}$
$4$ $\sqrt{6} (2 x y)$ $0$
$5$ $\sqrt{6} (x^{2} - y^{2})$ $1.6 \times 10^{6}$
$6$ $\sqrt{8} (3 x^{2} y + 3 y^{2} - 2 y)$ $0$
$7$ $\sqrt{8} (3 x^{3} + 3 x y^{2} - 2 x)$ $0$
$8$ $\sqrt{8} (3 x^{2} y - y^{3})$ $0$
$9$ $\sqrt{8} (x^{3} - 3 x y^{2})$ $6.0622 \times 10^{6}$

Table 2. Data comparison of relative position error
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Table 2. Data comparison of relative position error
$Δ x / pixel$ $Δ y / pixel$ $Δ z / mm$
引入的误差 −30.415 25.562 1.300
PPC法标定结果 −30 26 None
本文方法标定结果 −30.410 25.568 1.298

Table 3. Experimental data of relative position error
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Table 3. Experimental data of relative position error
$Δ x / pixel$ $Δ y / pixel$ $Δ z / mm$
标定结果 −10.845 1.383 0.813

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Chuan Jin, Yu He, Yan Tang, Junbo Liu, Haifeng Sun, Song Hu. Spatial mismatch calibration method for simultaneous slightly off-axis digital holographic microscopy system[J]. Opto-Electronic Engineering, 2022, 49(9): 220047

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