Acta Photonica Sinica, Volume. 41, Issue 2, 170(2012)

Title Influence of Deposited Temperature on Packing Density of SiO Thin Films

LUO Hai-han1,2、*, LIU Ding-quan1, YIN Xin1,2, CAI Yuan1, and ZHANG Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(8)

    [1] [1] WANG Xian-hua, WANG Le-yi, QIAO Yan-li, et al. Hyperspectral technology in remote sensing application[J]. Optoelectronic Technology & Information, 2001, 14(6): 7-14.

    [6] [6] HAO Dian-zhong, WU Fu-quan, MA Li-li, et al. Influence of deposited pressure on refractive index and packing density of ZrO2 coatings by electron beam evaporation[J]. Acta Photonica Sinica, 2006, 35(2): 224-227.

    [8] [8] ATNASSOV G, THIELSCH R, POPOV D. Optical properties of TiO2, Y2O3 and CeO2 thin films deposited by electron beam evaporation[J]. Thin Solid Films, 1993, 223(2): 288-292.

    [9] [9] CHEN Yu-yun, YEN Liang-yu, HSU Jin-cherng, et al. Aluminium oxide optical film fabricated with iion-assisted deposition using sulphur hexafluoride and oxygen working gases[J]. Optical Review, 2011, 18(3): 293-295.

    CLP Journals

    [1] Luo Haihan, Cai Qingyuan, Li Yaopeng, Liu Dingquan. Optical Character Study of Silicon Optical Films in Different Deposited Temperature[J]. Acta Optica Sinica, 2014, 34(4): 431001

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    LUO Hai-han, LIU Ding-quan, YIN Xin, CAI Yuan, ZHANG Li. Title Influence of Deposited Temperature on Packing Density of SiO Thin Films[J]. Acta Photonica Sinica, 2012, 41(2): 170

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    Paper Information

    Received: Sep. 13, 2011

    Accepted: --

    Published Online: Mar. 9, 2012

    The Author Email: Hai-han LUO (jxndlhh@sina.com)

    DOI:10.3788/gzxb20124102.0170

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