Opto-Electronic Engineering, Volume. 37, Issue 2, 74(2010)

Beam Alignment for Diameter Measurement of the Single Crystal Silicon Sphere

KANG Yan-hui1,*... ZHU Ji-gui1, LUO Zhi-yong2 and YE Sheng-hua1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

    [1] [1] Fujii Kenichi. Present state of the solid and liquid density standards [J]. Metrologia(S0026-1394),2004,41:S1-S15.

    [2] [2] LUO Zhi-yong,YANG Li-feng,GU Ying-zi,et al. A study on solid density primary standard [J]. Chinese Science Bulletin (S1001-6538),2007,52(21):2881-2886.

    [3] [3] LUO Zhi-yong. The progress and development trend of mass natural standard [J]. Acta Metrologica Sinica,2004,25(2):138-141.

    [4] [4] Becker Peter. History and progress in the accurate determination of the Avogadro constant [J]. Report on Progress in Physics (S0034-4885),2001,64:1945-2008.

    [5] [5] Fujii K,Tanaka M,Nezu Y,et al. Determination of the Avogadro constant by accurate measurement of the molar volume of a silicon crystal [J]. Metrologia(S0026-1394),1999,36:455-464.

    [7] [7] Saunders J B. Ball and cylinder interferometer [J]. J. Res. Nat. Bur. Stand. Sect. C(S0022-4316),1972,76:11-20.

    [8] [8] LUO Zhi-yong,YANG Li-feng,GU Ying-zi,et al. The absolute measurement of density of silicon crystals for determining Avogadro constant [J]. Acta Metrologica Sinica,2008,29(3):211-215.

    [9] [9] Fujii K,Tanaka M,New Y,et al. Interferometric measurements of the diameters of a single-crystal silicon sphere [J]. Rev. Sci. Instrum(S0034-6748),1992,63(11):5320-5325.

    [10] [10] Kuramoto Naoki,Fujii Kenichi. Interferometric determination of the diameter of a silicon sphere using a direct optical frequency tuning system [J]. IEEE Transactions on Instrumentation and Measurement(S0018-9456),2003,52(2):631-635.

    [13] [13] TANG Guan-qun. Analysis and comparison of several calculation methods of beam spot center [J]. Journal of Beijing Institute of Machinery,2009,24(1):61-64

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    KANG Yan-hui, ZHU Ji-gui, LUO Zhi-yong, YE Sheng-hua. Beam Alignment for Diameter Measurement of the Single Crystal Silicon Sphere[J]. Opto-Electronic Engineering, 2010, 37(2): 74

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    Paper Information

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    Received: Jul. 28, 2009

    Accepted: --

    Published Online: May. 28, 2010

    The Author Email: Yan-hui KANG (yanhuikang@163.com)

    DOI:10.3969/j.issn.1003-501x.2010.02.014

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