Laser & Optoelectronics Progress, Volume. 61, Issue 2, 0211005(2024)
Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)
Fig. 2. Linear dispersion lens group[18]
Fig. 3. Dispersion objectives for commercial lens combinations[20]
Fig. 4. Dispersion tube lens with large dispersion range[21]
Fig. 5. Four cascaded dispersion objectives[23]
Fig. 6. Dual light source chromatic confocal measurement system[24]
Fig. 7. Reverse dispersion method[25]
Fig. 8. Dispersion of ROE and DOE. (a) Refracting Optical Element; (b) diffractive Optical Element
Fig. 9. Miniaturized chromatic confocal point sensor with a diameter smaller than 2 mm[33]
Fig. 10. Chromatic confocal measurement system based on FZP[38]. (a) FZP; (b) measurement system
Fig. 11. Dispersion of hybrid lens and pure diffractive lens[12]. (a) Hybrid aspheric diffractive; (b) pure lens diffractive
Fig. 12. Chromatic confocal measurement system based on supercontinuum light source[47]
Fig. 13. Swept-source-based chromatic confocal measurement system[51]
Fig. 14. The confocal spectrum measured by the spectrometer[20]. (a) Spectral distribution of measurement signal with uniform power white light; (b) spectral distribution of measurement signal with white LED
Fig. 17. Spectral power distribution tunable light source[58]
Fig. 18. Three typical optical path structures of optical fiber spectrometer. (a) Crossed-asymmetric Czerny-Turner spectrometer; (b) symmetric Czerny-Turner spectrometer; (c) L-G-L spectrometer
Fig. 19. Structure based on lens and reflection grating[20]
Fig. 20. Lens and transmission grating spectrometer[72]
Fig. 21. Double dispersion imaging spectrometer[73]
Fig. 22. C-T spectrometer with cylindrical lens[74]
Fig. 23. Improved C-T spectrometer structure[78]
Fig. 24. Multi-field spectrometer[79]
Fig. 25. C-T spectrometer with hemispherical lens[80]
Fig. 26. C-T spectrometer with convex lens[81]
Fig. 27. Ultrathin spectrometer[82]
Fig. 29. Chromatic confocal measurement system with reference spectrum[67]
Fig. 30. Chromatic confocal system based on slit aperture[95]
Fig. 31. The type of spatial filter. (a) Slit; (b) pinhole array; (c) optical fiber array[97]
Fig. 32. Multi-point scanning system based on conjugate fiber bundles[98]
Fig. 33. Structure of line scanning chromatic confocal based on cylindrical mirror[99]
Fig. 34. Beam mobile scanning system based on double galvanometer[69]
Fig. 35. Beam mobile scanning system based on steering mirror[103]
Fig. 36. Galvanometer scanning full field chromatic confocal system[70]
Fig. 37. Chromatic confocal three-point sensor[104]. (a) Structure diagram; (b) layout of segmented diffraction elements
Fig. 39. Dot matrix scanning system based on single pinhole array[113]
Fig. 40. DMD-based lateral scanning system[118]. (a) Schematic diagram of the system; (b) scanning floor plan
Fig. 41. Chromatic confocal scanning system with LCD panel[119]
Fig. 42. Chromatic confocal system based on DMD[120]. (a) System diagram; (b) DMD projection pattern
Fig. 43. Different types of objective light path[71]. (a) Non-flat field non-telecentric objective; (b) flat-field non-telecentric objective; (c) flat-field telecentric objective
Fig. 44. CCT system based on concave grating[126]
Fig. 45. CCT system based on refraction and diffraction elements[128]
Fig. 46. Biaxial chromatic confocal system for inclined illumination[130]
Fig. 47. Area array spectrometer[100]
Fig. 48. Double pinhole hyperspectral camera[132]
Fig. 49. Double Amici prism[119]
Fig. 50. Conversion of RGB to HSI[131]
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Rongsheng Lu, Zilong Zhang, Ailin Zhang, Zhiwei Feng, Yan Xu, Liujie Yang. Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(2): 0211005
Category: Imaging Systems
Received: Dec. 7, 2023
Accepted: Dec. 21, 2023
Published Online: Feb. 6, 2024
The Author Email: Lu Rongsheng (rslu@hfut.edu.cn)