Laser & Optoelectronics Progress, Volume. 61, Issue 2, 0211005(2024)

Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)

Rongsheng Lu*, Zilong Zhang, Ailin Zhang, Zhiwei Feng, Yan Xu, and Liujie Yang
Author Affiliations
  • School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, Anhui , China
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    Figures & Tables(53)
    Principle of chromatic confocal measurement technology[11-12]. (a) The structure based on pinhole and beamsplitter; (b) the structure based on Y-type fiber
    Linear dispersion lens group[18]
    Dispersion objectives for commercial lens combinations[20]
    Dispersion tube lens with large dispersion range[21]
    Four cascaded dispersion objectives[23]
    Dual light source chromatic confocal measurement system[24]
    Reverse dispersion method[25]
    Dispersion of ROE and DOE. (a) Refracting Optical Element; (b) diffractive Optical Element
    Miniaturized chromatic confocal point sensor with a diameter smaller than 2 mm[33]
    Chromatic confocal measurement system based on FZP[38]. (a) FZP; (b) measurement system
    Dispersion of hybrid lens and pure diffractive lens[12]. (a) Hybrid aspheric diffractive; (b) pure lens diffractive
    Chromatic confocal measurement system based on supercontinuum light source[47]
    Swept-source-based chromatic confocal measurement system[51]
    The confocal spectrum measured by the spectrometer[20]. (a) Spectral distribution of measurement signal with uniform power white light; (b) spectral distribution of measurement signal with white LED
    SPD characteristics of different light sources. (a) SPD of tungsten halogen lamps[52]; (b) SPD of xenon lamp[53]; (c) SPD of white LED[54]; (d) SPD of supercontinuum light sources[55]
    Advanced light source technology. (a) Laser driven light source[56]; (b) Sunlike full spectrum LED[57]
    Spectral power distribution tunable light source[58]
    Three typical optical path structures of optical fiber spectrometer. (a) Crossed-asymmetric Czerny-Turner spectrometer; (b) symmetric Czerny-Turner spectrometer; (c) L-G-L spectrometer
    Structure based on lens and reflection grating[20]
    Lens and transmission grating spectrometer[72]
    Double dispersion imaging spectrometer[73]
    C-T spectrometer with cylindrical lens[74]
    Improved C-T spectrometer structure[78]
    Multi-field spectrometer[79]
    C-T spectrometer with hemispherical lens[80]
    C-T spectrometer with convex lens[81]
    Ultrathin spectrometer[82]
    Spectral detection devices. (a) Based on spectral transmittance[44]; (c) based on the differential ratio of two CCD signals[83]
    Chromatic confocal measurement system with reference spectrum[67]
    Chromatic confocal system based on slit aperture[95]
    The type of spatial filter. (a) Slit; (b) pinhole array; (c) optical fiber array[97]
    Multi-point scanning system based on conjugate fiber bundles[98]
    Structure of line scanning chromatic confocal based on cylindrical mirror[99]
    Beam mobile scanning system based on double galvanometer[69]
    Beam mobile scanning system based on steering mirror[103]
    Galvanometer scanning full field chromatic confocal system[70]
    Chromatic confocal three-point sensor[104]. (a) Structure diagram; (b) layout of segmented diffraction elements
    3D scanning system installation diagram. (a) Based on microlens array[107]; (b) microlens-based turntables[108]
    Dot matrix scanning system based on single pinhole array[113]
    DMD-based lateral scanning system[118]. (a) Schematic diagram of the system; (b) scanning floor plan
    Chromatic confocal scanning system with LCD panel[119]
    Chromatic confocal system based on DMD[120]. (a) System diagram; (b) DMD projection pattern
    Different types of objective light path[71]. (a) Non-flat field non-telecentric objective; (b) flat-field non-telecentric objective; (c) flat-field telecentric objective
    CCT system based on concave grating[126]
    CCT system based on refraction and diffraction elements[128]
    Biaxial chromatic confocal system for inclined illumination[130]
    Area array spectrometer[100]
    Double pinhole hyperspectral camera[132]
    Double Amici prism[119]
    Conversion of RGB to HSI[131]
    • Table 1. Comparison of structure and performance of dispersive objective lenses

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      Table 1. Comparison of structure and performance of dispersive objective lenses

      Structure of objective lensesMeritLimitation
      ROEOverall structureCompact structure and good performanceGreat design difficulty
      Separation of collimation and dispersionEasy to achieve different dispersion ranges by replacing the dispersion groupBalance performance requirements for lens sets
      Separation of dispersion and focusingEasy to achieve different dispersion ranges by replacing the objective lensesLimited by microscopic objectives
      Cascade of multi-lens groupsEasy to extend the dispersion rangeLow light efficiency and complex structure
      GRINCompact structure and small diameterSingle structural form
      DOECombination of DOE and high-power microscope objectiveEasy to produce axial chromatic aberrationLimited by microscopic objectives
      FZPGood dispersion ability and excellent performanceHigh production process requirements
      Combination of DOE and ROEHigh objective performanceHigh design requirements
    • Table 2. Comparison of typical light source

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      Table 2. Comparison of typical light source

      Light sourceMeritLimitation
      Tungsten halogen lamp/Xenon lampHigh intensity and wide spectral rangeHigh heat production,low light-energy coupling efficiency,and non-adjustable spectral power distribution
      White LEDSmall size,low cost,long lifetime,and easy to integrateLimited wavelength range and uneven spectral power distribution
      Supercontinuum white lightBroad wavelength range and uniform energy distributionLarge size,expensive,and non-adjustable spectral power distribution
      Laser driven light sourceBroad wavelength range,uniform energy distribution,long lifetime,and easy to integrateExpensive and non-adjustable spectral power distribution
      Sunlike full-spectrum LEDBroad wavelength range,uniform energy distribution,long lifetime,small size,and low costNon-adjustable spectral power distribution
      Spectrally tunable light sourceBroad wavelength range,uniform and adjustable spectral power distribution,long lifetime,and low costLarge size and complex adjustment process
    • Table 3. Performance comparison of scanning modes of chromatic confocal measurement system

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      Table 3. Performance comparison of scanning modes of chromatic confocal measurement system

      Scanning methodMeritLimitation
      Line scanningThe slitSimple system structureMulti-pinhole crosstalk and limited scan line length
      The moving beamHigh beam quality and high light efficiencyComplex system structure and difficult system alignment
      Area scanningThe pinhole arraySimple system structure and fast scanning speedMulti-pinhole crosstalk,low light efficiency,and high backscatter noise
      The programmable arrayDirect 3D scanning,flexible scanning method,and fast scanning speedLow light efficiency and complex system structure
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    Rongsheng Lu, Zilong Zhang, Ailin Zhang, Zhiwei Feng, Yan Xu, Liujie Yang. Research Progress on Key Technologies of Chromatic Confocal Sensors (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(2): 0211005

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    Paper Information

    Category: Imaging Systems

    Received: Dec. 7, 2023

    Accepted: Dec. 21, 2023

    Published Online: Feb. 6, 2024

    The Author Email: Lu Rongsheng (rslu@hfut.edu.cn)

    DOI:10.3788/LOP232639

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