[1] [1] LUO L P, YUN X N, KIM K Y. The manufacturing and developing of the TFT-LCD ［J］. Advanced Display, 2012, 23(3): 31-38. (in Chinese)

[2] [2] KIM H W, YOO S I. Non referential method for defects inspection of TFT-LCD pad ［J］. SPIE, 2008, 6813: 68130V.

[3] [3] HAN F F, DUAN F J, WANG K, et al.. Study and model construction for camera depth-of-field in machine-vision inspection system ［J］. Chinese Journal of Sensors and Actuators, 2010, 23(12): 1744-1747. (in Chinese)

[4] [4] SHI Y Q, LU R SH, ZHANG T D. Defect inspection system design based on the automated optical inspection technique for LCD backlight modules ［J］. Chinese Journal of Sensors and Actuators, 2015, 28(5): 768-773. (in Chinese)

[5] [5] XIAO M, ZHUANG CH G, XIONG ZH H. Measurement algorithm of LCD mounting dimension based on machine vision ［J］. China Mechanical Engineering, 2014, 25(1): 7-11. (in Chinese)

[6] [6] WANG Y H, BAI T SH, DAN X Z, et al.. Research and comparison of TFT-LCD panel optical detection auto-focus algorithm ［J］. Chinese Journal of Liquid Crystals and Displays, 2016, 31(4): 339-346. (in Chinese)

[7] [7] WANG Y H, ZHANG CH M, LIAN H H.Based on linear CCD scanning ITO conductive glass index detection technology research ［J］. Gansu Science and Technology, 2012, 28(2): 46-47. (in Chinese)

[8] [8] WANG Y F. Gas Lubricated Theory and Design Manual of Gas Bearings ［M］. Beijing: Mechanical Industry Press, 1999. (in Chinese)

[9] [9] HUANG B, YU X F, HUANG Y, et al.. Research on static calibration method of flexible three-dimensional tactile sensor ［J］. Chinese Journal of Scientific Instrument, 2010, 31(9): 2003-2009. (in Chinese)

[10] [10] HUANG B, CHEN SH J, ZHANG W W, et al.. Influence factors on static characteristics of flotation force transducers ［J］. Opt. Precision Eng., 2014, 22(2): 390-396. (in Chinese)

[11] [11] GAO S Y, CHENG K, CHEN SH J, et al.. CFD based investigation on influence of orifice chamber shapes for the design of aerostatic thrust bearings at ultra-high speed spindles ［J］. Tribology International, 2015, 92: 211-221.

[12] [12] DONG H, ZHAO X L, ZHANG J A. Static characteristic analysis and experimental research of aerostatic thrust bearing with annular elastic uniform pressure plate ［J］. Advances in Mechanical Engineering, 2015, 7(3): 1-13.

[13] [13] ZHANG J H, SUN SH J, GUO J H. The structural design for high-speed gas static bearing ［J］. Modular Machine Tool & Automatic Manufacturing Technique, 2004(12): 23-25. (in Chinese)

[14] [14] LU ZH W, MA F J, LIU B, et al.. Research on dynamic characteristics of aerostatic thrust bearings based on perturbation method ［J］. Acta Armamentarii, 2016, 37(1): 149-154. (in Chinese)

[15] [15] XUE D W. Plate and Shell Theory ［M］. Beijing: Beijing Industrial Institute Publishing House, 1988. (in Chinese)

[16] [16] POWELL J W. Design of Aerostatic Bearing ［M］. London: The Machinery Publishing Co. Ltd, 1970.