Acta Optica Sinica, Volume. 44, Issue 5, 0528001(2024)

Fiber-Optic Temperature and Humidity Sensor Based on Fabry-Perot Interference and Anti-Resonance Effect

Ziyi Hu1, Jianhua Chang1,2、*, Aobo Jin1, Ming Chen1, and Yao Xu1
Author Affiliations
  • 1School of Electronics & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, Jiangsu , China
  • 2Collaborative Innovation Center of Atmospheric Environment and Equipment Technology, Nanjing University of Information Science & Technology, Nanjing 210044, Jiangsu , China
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    Figures & Tables(10)
    Schematic of cascade sensor
    Manufacturing process diagrams of cascaded sensors. (a) Diagram of silicon tube corroded by HF solution; (b) diagram of fusion between SMF and NCF with coating; (c) diagram of PI coated NCF end face; (d) diagram of fiber insertion into silicon tube; (e) diagram of FPI and AR structure cascade
    Sensor micrograph and test setup diagram. (a) Micrograph of sensor; (b) experimental test setup diagram
    Vernier effect. (a) Reflectance spectrum; (b) FFT result of interference spectrum
    Relative humidity response characteristics. (a) Envelope of the interference spectra; (b) fitting of envelope displacement curve; (c) transmittance spectra; (d) fitting of non-transmission wavelength displacement curve
    Temperature response characteristics. (a) Envelope of interference spectra; (b) fitting of envelope displacement curve; (c) transmittance spectra; (d) fitting of non-transmission wavelength displacement curve
    Calculation test results. (a) Reflection spectra; (b) transmission spectra
    Stability test results. (a)(c) Characteristic spectral changes; (b)(d) shift of wavelength position
    Reproducibility test results. (a)(b) Humidity repeatability test results; (c)(d) temperature repeatability test results
    • Table 1. Performance comparison of fiber optic sensors for simultaneous measurement of temperature and humidity

      View table

      Table 1. Performance comparison of fiber optic sensors for simultaneous measurement of temperature and humidity

      TechniqueSensitivity of humidity /(pm·%-1

      Range of

      humidity /%

      Sensitivity of temperature /(pm·℃-1Range of temperature /℃Ref.
      FBG and FPI22.0720-909.9815-6513
      MZI and FPI-13227.83-76.1737022.8-32.814
      PI-coated HB-PM fiber1.825-8011.125-6031
      Array of LPGs53035-9846025-3832
      Hybrid functional tip43055-90397028-4633
      FPI and AR structure510.2510-80-448026-35This work
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    Ziyi Hu, Jianhua Chang, Aobo Jin, Ming Chen, Yao Xu. Fiber-Optic Temperature and Humidity Sensor Based on Fabry-Perot Interference and Anti-Resonance Effect[J]. Acta Optica Sinica, 2024, 44(5): 0528001

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    Paper Information

    Category: Remote Sensing and Sensors

    Received: Oct. 10, 2023

    Accepted: Dec. 20, 2023

    Published Online: Mar. 19, 2024

    The Author Email: Chang Jianhua (jianhuachang@nuist.edu.cn)

    DOI:10.3788/AOS231637

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