Acta Photonica Sinica, Volume. 48, Issue 12, 1211002(2019)

Design of X-ray Microscope Employing Toroid Mirrors Working at Grazing-incidence

Ying CUI1,1,3,3, Jun-hua HE1,1、*, Bing-jing WU1,1, Ya-dong YAN1,1, and Rui-hua XU1,1
Author Affiliations
  • 1Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, 710119, China
  • 3College of Equipment Management and Support, Engineering University of PAP, Shaanxi, Xi'an, 710086, China
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    Figures & Tables(13)
    Schematic diagram of toroid mirror
    Schematic diagram of X-ray imaging system
    Reflective imaging diagram of double toroid mirrors
    Spot diagram on image plane
    Longitudinal spherical aberration of single or two toroid mirrors
    The character of the two toroid mirrors
    The influence of parameters on the performance of microscope
    Auxiliary adjustment system
    Schematic diagram of microscope aiming section
    Optical structure of binocular vision aiming system
    Image quality evaluation of binocular vision aiming system
    Backlight image of a Ni mesh grid and resolution of the image
    • Table 1. Positioning tolerances of each mirrors

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      Table 1. Positioning tolerances of each mirrors

      M1M2M3
      Translation along the X-axis200 μm200 μm500 μm
      Translation along the Y-axis50 μm50 μm50 μm
      Translation along the Z-axis200 μm200 μm1 000 μm
      Rotation around the X-axis0.01°0.01°0.01°
      Rotation around the Y-axis0.01°0.01°0.01°
      Rotation around the Z-axis0.1°0.1°0.1°
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    Ying CUI, Jun-hua HE, Bing-jing WU, Ya-dong YAN, Rui-hua XU. Design of X-ray Microscope Employing Toroid Mirrors Working at Grazing-incidence[J]. Acta Photonica Sinica, 2019, 48(12): 1211002

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    Paper Information

    Received: May. 27, 2019

    Accepted: Jul. 27, 2019

    Published Online: Mar. 17, 2020

    The Author Email: HE Jun-hua (hejunhua@opt.ac.cn)

    DOI:10.3788/gzxb20194812.1211002

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