The Application of Genetic Algorithm in Thin Film Characters Measurement

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Photonica Sinica, Volume. 36, Issue 11, 2053(2007)

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References(2)

[1] [1] LAAZIZA Y,BENNOUNA A,CHADBOURN N.Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements[J].Thin Solid Films,2000,372(5):149-155.

[3] [3] CHEN Yan-ping,LIU Yu-ling,LIU Peng,et al.Determining thin film thickness characterization using adaptive simulated annealing algorithm[C].SPIE,2006,6024:16.

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[2] CHU Dong, GONG Xing-zhi, CHENG Liang, YU Fei-hong. Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm[J]. Opto-Electronic Engineering, 2010, 37(2): 45

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Application of Genetic Algorithm in Thin Film Characters Measurement[J]. Acta Photonica Sinica, 2007, 36(11): 2053

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