Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

Shiqi Tao; Qingzhong Huang; Liangqiu Zhu; Jun Liu; Yinglu Zhang; Ying Huang; Yi Wang; Jinsong Xia

doi:10.1364/PRJ.6.000686

Photonics Research, Volume. 6, Issue 7, 686(2018)

Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature

Shiqi Tao¹, Qingzhong Huang^1,2、*, Liangqiu Zhu¹, Jun Liu¹, Yinglu Zhang¹, Ying Huang¹, Yi Wang¹, and Jinsong Xia^1,3、*

Author Affiliations

¹Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China

²e-mail: huangqz@mail.hust.edu.cn

³e-mail: jsxia@hust.edu.cn

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Shiqi Tao, Qingzhong Huang, Liangqiu Zhu, Jun Liu, Yinglu Zhang, Ying Huang, Yi Wang, Jinsong Xia. Athermal 4-channel (de-)multiplexer in silicon nitride fabricated at low temperature[J]. Photonics Research, 2018, 6(7): 686

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Paper Information

Category: Silicon Photonics

Received: Feb. 1, 2018

Accepted: Apr. 29, 2018

Published Online: Jul. 4, 2018

The Author Email: Qingzhong Huang (huangqz@mail.hust.edu.cn), Jinsong Xia (jsxia@hust.edu.cn)

DOI:10.1364/PRJ.6.000686

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology