Optics and Precision Engineering, Volume. 13, Issue z1, 103(2005)
Multi-wavelength interferometry for nanometer scale spacing
References(3)
[1] [1] LACEY C,ROSS E W.Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings[P].U.S:5457534.Nov.10,1995.
[3] [3] DURAN C A,SHI R F.Apparatus and method for measuring flying height and a real index of refraction[P].U.S:6184992.Feb.6,2001.
[4] [4] WOMACK K H,BUTLER A.Determining the complex refractive index phase offset in interferometric flying height testing[P].U.S:5781299.Jul.14,1998.
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[in Chinese], [in Chinese], [in Chinese]. Multi-wavelength interferometry for nanometer scale spacing[J]. Optics and Precision Engineering, 2005, 13(z1): 103
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