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Optics and Precision Engineering, Volume. 13, Issue z1, 103(2005)

Multi-wavelength interferometry for nanometer scale spacing

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    [in Chinese], [in Chinese], [in Chinese]. Multi-wavelength interferometry for nanometer scale spacing[J]. Optics and Precision Engineering, 2005, 13(z1): 103

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    Received: Jul. 20, 2005

    Accepted: --

    Published Online: Nov. 3, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology