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Optics and Precision Engineering, Volume. 17, Issue 7, 1646(2009)

Realization of interface between MEMS process simulation and finite element software

JIAN Fu-jian* and LI Wei-hua
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    JIAN Fu-jian, LI Wei-hua. Realization of interface between MEMS process simulation and finite element software[J]. Optics and Precision Engineering, 2009, 17(7): 1646

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    Paper Information

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    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Oct. 28, 2009

    The Author Email: Fu-jian JIAN (jane802@gmail.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology