The process simulation for Micro-electric-mechanic Systems(MEMS) can be used in predicting the actual structure of a MEMS before processing,which contributes to understand processing properties,shorten design periods and to reduce production costs.Because the current simulation software for MEMS analysis can not be combined with a finite element software,this paper presents a interface named as ANDYD Parametric Design Language(APDL) to link the process simulation software and the finite element software.By proposed APDL,the results from MEMS process simulation are imported into the finite element software to establish a model,then it is used to analyze on mechanical,electrical and thermal parameters.Moreover,the largest circle algorithm is introduced the software to implement the model reconstruction for the process simulation in the finite element software after analysis on several kinds of boundary contour extraction methods,which completes an seamless linking from the process simulation to the finite element analysis(FEA).Experimental results prove that proposed interface design is conductive to the systematization of MEMS CAD technologies.