Acta Photonica Sinica, Volume. 32, Issue 7, 892(2003)

New Filtering Approach on Partial Coherent Imaging System for Improving Photolithography Resolution

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    References(6)

    [1] [1] Mendlovic D, Ozaktas H M. Fractional Fourier transforms and their optical implementation: I.J Opt Soc Am(A), 1993,10(9):1875~1881

    [2] [2] Ozaktas H M, Mendlovic D. Fractional Fourier transforms and their optical implementation: II.J Opt Soc Am(A),1993,10(12):2522~2531

    [3] [3] Lohmann A W. Image rotation, Wigner rotation, and the fractional Fourier transform.J Opt Soc Am(A),1993,10(10):2181~2186

    [4] [4] Fukuda H,Terasawa T,Okazaki S. Spatial filtering for depth of focus and resolution enhancement in optical lithography.J Vac Sci Technol,1991,B9(6):3113~3116

    [5] [5] Namias. The fractional order Fourier transform and its applications in the quantum mechanics.J Inst Math Applics,1980,25:241~265

    [6] [6] Zhang Yixiao, Du Jinglei, Cui Zheng. Fractional Fourier domain filter applied to improve image quality in photolithography.SPIE,2002,4755:755~759

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. New Filtering Approach on Partial Coherent Imaging System for Improving Photolithography Resolution[J]. Acta Photonica Sinica, 2003, 32(7): 892

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    Received: Sep. 3, 2002

    Accepted: --

    Published Online: Sep. 17, 2007

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