[1] C ENDRINO J, C ÅRHAMMAR, C GUTIÉRREZ et al. Spectral evidence of spinodal decomposition, phase transformation and molecular nitrogen formation in supersaturated TiAlN films upon annealing. Acta Materialia, 59, 6287-6296(2011).

[2] R RACHBAUER, J GENGLER J, A VOEVODIN A et al. Temperature driven evolution of thermal, electrical, and optical properties of Ti-Al-N coatings. Acta Materialia, 60, 2091-2096(2012).

[3] P MAYRHOFER, R RACHBAUER, D HOLEC et al. Protective transition metal nitride coatings. Comprehensive Materials Processing, 4, 355-387(2014).

[4] N NORRBY, L ROGSTRÖM, P JOHANSSON-JÕESAAR M et al. In situ X-ray scattering study of the cubic to hexagonal transformation of AlN in Ti₁-_xAl_xN. Acta Materialia, 73, 205-214(2014).

[5] C SCHRAMM I, J JÖESAAR M P, J JENSEN et al. Impact of nitrogen vacancies on the high temperature behavior of (Ti₁-_xAl_x)N_yalloys. Acta Materialia, 119, 218-228(2016).

[6] K ZOU H, L CHEN, K CHANG K et al. Enhanced hardness and age-hardening of TiAlN coatings through Ru addition. Scripta Materialia, 162, 382-386(2019).

[7] T RAJAN S, M KARTHIKA, A BENDAVID et al. Apatite layer growth on glassy Zr₄₈Cu₃₆Al₈Ag₈ sputtered titanium for potential biomedical applications. Applied Surface Science, 369, 501-509(2016).

[8] N CAI C, C ZHANG, S SUN Y et al. ZrCuFeAlAg thin film metallic glass for potential dental applications. Intermetallics, 86, 80-87(2017).

[9] M LEE C, P CHU J, Z CHANG W et al. Fatigue property improvements of Ti-6Al-4V by thin film coatings of metallic glass and TiN: a comparison study. Thin Solid Films, 561, 33-37(2014).

[10] H TSAI P, Z LIN Y, B LI J et al. Sharpness improvement of surgical blade by means of ZrCuAlAgSi metallic glass and metallic glass thin film coating. Intermetallics, 31, 127-131(2012).

[11] H TSAI P, H LI T, T HSU K et al. Effect of coating thickness on the cutting sharpness and durability of Zr-based metallic glass thin film coated surgical blades. Thin Solid Films, 618, 36-41(2016).

[12] P CHU J, C JANG J S, C HUANG J et al. Thin film metallic glasses: unique properties and potential applications. Thin Solid Films, 520, 5097-5122(2012).

[13] G GORDON R. Criteria for choosing transparent conductors. MRS Bulletin, 25, 52-57(2000).

[14] H CHENG C, M TING J. Transparent conducting GZO, Pt/GZO, and GZO/Pt/GZO thin films. Thin Solid Films, 516, 203-207(2007).

[15] D KIM. Improved electrical and optical properties of GZO films with a thin TiO₂ buffer layer deposited by RF magnetron sputtering. Ceramics International, 40, 1457-1460(2014).

[16] L WANG H, H SUN Y, L FANG et al. Growth and characterization of high transmittance GZO films prepared by Sol-Gel method. Thin Solid Films, 615, 19-24(2016).

[17] F LU L, L SHEN H, J FENG et al. The enhanced conductivity of AZO thin films on soda lime glass with an ultrathin Al₂O₃ buffer layer. Physica B, 405, 3320-3323(2010).

[18] L SHEN H, H ZHANG, F LU L et al. Preparation and properties of AZO thin films on different substrates. Progress in Natural Science: Materials International, 20, 44-48(2010).

[19] K SUBRAMANYAM T, P GOUTHAM, S PAVAN KUMAR et al. Optimization of sputtered AZO thin films for device application. Materials Today: Proceedings, 5, 10851-10859(2018).

[20] K LÜ, L ZHU B, K LI et al. Effect of hydrogen and Cu interlayer on the optical and electrical properties of GZO thin film. Journal of Inorganic Materials, 29, 494-497(2014).

[21] D CHEN, G LÜ J, Y HUANG J et al. Performances of GaN-based LEDs with AZO films as transparent electrodes. Journal of Inorganic Materials, 28, 650-652(2013).

[22] J QIN X, Z HAN S H, L ZHAO et al. Fabrication of transparent conductive Al-doped ZnO thin films by aerosol-assisted chemical vapour deposition. Journal of Inorganic Materials, 26, 608-611(2011).

[23] E AYDOGAN, S WEAVER J, A MALOY S et al. Microstructure and mechanical properties of FeCrAl alloys under heavy ion irradiations. Journal of Nuclear Materials, 503, 250-262(2018).

[24] S DRYEPONDT, A UNOCIC K, T HOELZER D et al. Development of low-Cr ODS FeCrAl alloys for accident-tolerant fuel cladding. Journal of Nuclear Materials, 501, 59-71(2018).

[25] N GUSSEV M, E CAKMAK, G FIELD K et al. Impact of neutron irradiation on mechanical performance of FeCrAl alloy laser-beam weldments. Journal of Nuclear Materials, 504, 221-233(2018).

[26] E HOGGAN R, F HE L, M HARP J et al. Interdiffusion behavior of U₃Si₂ with FeCrAl via diffusion couple studies. Journal of Nuclear Materials, 502, 356-369(2018).

[27] L JIN D, N NI, Y GUO et al. Corrosion of the bonding at FeCrAl/ Zr alloy interfaces in steam. Journal of Nuclear Materials, 508, 411-422(2018).

[28] D PARK, A MOUCHE P, C ZHONG W et al. TEM/STEM study of zircaloy-2 with protective FeAl(Cr) layers under simulated BWR environment and high-temperature steam exposure. Journal of Nuclear Materials, 502, 95-105(2018).

[29] C TANG C, A JIANU, M STEINBRUECK et al. Influence of composition and heating schedules on compatibility of FeCrAl alloys with high-temperature steam. Journal of Nuclear Materials, 511, 496-507(2018).

[30] K CHANG K, P MENG F, F GE F et al. Theory-guided bottom- up design of the FeCrAl alloys as accident tolerant fuel cladding materials. Journal of Nuclear Materials, 516, 63-72(2019).

[31] M CAIRNEY J, G HARRIS S, R MUNROE P et al. Transmission electron microscopy of TiN and TiAlN thin films using specimens prepared by focused ion beam milling. Surface and Coatings Technology, 183, 239-246(2004).

[32] R RACHBAUER, E STERGAR, S MASSL et al. Three-dimensional atom probe investigations of Ti-Al-N thin films. Scripta Materialia, 61, 725-728(2009).

[33] R WEBER F, F FONTAINE, M SCHEIB et al. Cathodic arc evaporation of (Ti, Al) N coatings and (Ti, Al) N/TiN multilayer-coatings-correlation between lifetime of coated cutting tools, structural and mechanical film properties. Surface and Coatings Technology, 227-232(2004).

[34] D MÜNZ W. A new alternative to TiN coatings. Journal of Vacuum Science and Technology A, 4, 2717-2725(1986).

[35] U WAHLSTRÖM, L HULTMAN, E SUNDGREN J et al. Crystal growth and microstructure of polycrystalline Ti₁-_xAl_xN alloy films deposited by ultra-high-vacuum dual-target magnetron sputtering. Thin Solid Films, 235, 62-70(1993).

[36] M ZHOU, Y MAKINO, M NOSE et al. Phase transition and properties of Ti-Al-N thin films prepared by rf-plasma assisted magnetron sputtering. Thin Solid Films, 339, 203-208(1999).

[37] A HÖRLING, L HULTMAN, M ODÉN et al. Mechanical properties and machining performance of Ti₁-_xAl_xN-coated cutting tools. Surface and Coatings Technology, 191, 384-392(2005).

[38] K KUTSCHEJ, P MAYRHOFER, M KATHREIN et al. Structure, mechanical and tribological properties of sputtered Ti₁-_xAl_xN coatings with 0.5≤x≤0.75. Surface and Coatings Technology, 200, 2358-2365(2005).

[39] D RAFAJA, A POKLAD, G SCHREIBER et al. On the preferred orientation in Ti₁-_xAl_xN and Ti₁-_x-_yAl_xSi_yN thin films. Zeitschrift für Metallkunde, 96, 738-742(2005).

[40] G GRECZYNSKI, J LU, M JOHANSSON et al. Role of Tiⁿ⁺ and Alⁿ⁺ ion irradiation(n=1, 2) during Ti₁-_xAl_xN alloy film growth in a hybrid HIPIMS/magnetron mode.. Surface and Coatings Technology, 206, 4202-4211(2012).

[41] B GROSSMANN, N SCHALK, C CZETTL et al. Phase composition and thermal stability of arc evaporated Ti₁-_xAl_xN hard coatings with 0.4≤x≤0.67. Surface and Coatings Technology, 309, 687-693(2017).

[42] M HANS, D MUSIC, T CHEN Y et al. Crystallite size-dependent metastable phase formation of TiAlN coatings. Scientific Reports, 7, 1-7(2017).

[43] P SPENCER, H HOLLECK. Application of a thermochemical data-bank system to the calculation of metastable phase formation during PVD od carbide, nitride and boride coatings. High Temperature Science, 27, 295-309(1990).

[44] H STOLTEN, P SPENCER, D NEUSCHÜTZ et al. Estimation of formation enthalpies for transition metal mono nitrides, carbides and oxides. Journal de Chimie Physique, 90, 209-219(1993).

[45] Q CHEN, B SUNDMAN. Thermodynamic assessment of the Ti-Al-N system. Journal of Phase Equilibria, 19, 146-160(1998).

[46] J ZENG K, R SCHMID-FETAER. Thermodynamic Modeling and Applications of the Ti-Al-N Phase Diagram. Thermodynamics of Alloy Formation, 275-293(1997).

[47] P SPENCER. Thermodynamic prediction of metastable coating structures in PVD processes. Zeitschrift für Metallkunde, 92, 1145-1150(2001).

[48] W HUGOSSON H, H HÖGBERG, M ALGREN et al. Theory of the effects of substitutions on the phase stabilities of Ti₁-_xAl_xN. Journal of Applied Physics, 93, 4505-4511(2003).

[49] P MAYRHOFER, D MUSIC, J SCHNEIDER et al. Influence of the Al distribution on the structure, elastic properties, and phase stability of supersaturated Ti₁-_xAl_xN. Journal of Applied Physics, 100, 1-5(2006).

[50] D HOLEC, F ROVERE, H MAYRHOFER P et al. Pressure- dependent stability of cubic and wurtzite phases within the TiN-AlN and CrN-AlN systems. Scripta Materialia, 62, 349-352(2010).

[51] H EUCHNER, P MAYRHOFER. Vacancy-dependent stability of cubic and wurtzite Ti₁-_xAl_xN. Surface and Coatings Technology, 275, 214-218(2015).

[52] N SHULUMBA, O HELLMAN, Z RAZA et al. Lattice vibrations change the solid solubility of an alloy at high temperatures. Physical Review Letters, 117, 1-6(2016).

[53] D SANGIOVANNI, D EDSTRÖM, L HULTMAN et al. Dynamics of Ti, N, and TiN_x (x= 1-3) admolecule transport on TiN (001) surfaces.. Physical Review B, 8, 1-10(2012).

[54] D SANGIOVANNI, D EDSTRÖM, L HULTMAN et al. Ab initio.and classical molecular dynamics simulations of N₂ desorption from TiN (001) surfaces. Surface Science, 624, 25-31(2014).

[55] D SANGIOVANNI, B ALLING, P STENETEG et al. Self- interstitial diffusion, and Frenkel-pair formation/dissociation in B1 TiN studied by ab initio and classical molecular dynamics with optimized potentials. Physical Review B, 91, 1-17(2015).

[56] B ALLING, P STENETEG, C THOLANDER et al. Configurational disorder effects on adatom mobilities on Ti₁-_xAl_xN (001) surfaces from first principles. Physical Review B, 85, 1-5(2012).

[57] K CHANG K, M TO BABEN, D MUSIC et al. Estimation of the activation energy for surface diffusion during metastable phase formation. Acta Materialia, 98, 135-140(2015).

[58] K CHANG K, D MUSIC, M TO BABEN et al. Modeling of metastable phase formation diagrams for sputtered thin films. Science and Technology of Advanced Materials, 17, 210-219(2016).

[59] B CANTOR, R CAHN. Metastable alloy phases by co-sputtering. Acta Materialia, 24, 845-852(1976).

[60] N SAUNDERS, P MIODOWNIK A. Phase formation in co-deposited metallic alloy thin flms. Journal of Materials Science, 22, 629-637(1987).

[61] D LIU S, K CHANG K, S MRÁZ et al. Modeling of metastable phase formation for sputtered Ti₁-_xAl_xN thin films. Acta Materialia, 165, 615-625(2019).

[62] H KIM K, H LEE S. Comparative studies of TiN and Ti₁-_xAl_xN by plasma-assisted chemical vapor deposition using a TiCl₄/AlCl₃/N₂/ H₂/Ar gas mixture. Thin Solid Films, 283, 165-170(1996).

[63] H LEE S, J KIM B, H KIM H et al. Structural analysis of AlN and (Ti₁-_xAl_x) N coatings made by plasma enhanced chemical vapor deposition. Journal of Applied Physics, 80, 1469-1473(1996).

[64] R PRANGE, R CREMER, D NEUSCHÜTZ et al. Plasma- enhanced CVD of Plasma- enhanced CVD of (Ti,Al) N films from chloridic precursors in a DC glow discharge. Surface and Coatings Technology, 208-214(2000).

[65] I ENDLER, M HÖHN, M HERRMANN et al. Novel aluminum- rich Ti₁-_xAl_xN coatings by LPCVD. Surface and Coatings Technology, 203, 530-533(2008).

[66] T TODT, J ZALESAK, R DANIEL et al. Al-rich cubic Al_{0. 8}Ti_{0. 2}N coating with self-organized nano-lamellar microstructure: thermal and mechanical properties. Surface and Coatings Technology, 291, 89-93(2016).

[67] M GROVENOR C R, G HENTZELL H T, A SMITH D et al. The development of grain structure during growth of metallic films. Acta Materialia The development of grain structure during growth of metallic films. Acta Materialia, 32, 773-781(1984).

[68] I PETROV, B BARNA P, L HULTMAN et al. Microstructural evolution during film growth. Journal of Vacuum Science & Technology A, 21, S117-S128(2003).

[69] A EINSTEIN. Elementare teorie der brownschen bewegung. Z Elektrochem, 14, 371-381(1908).

[70] B SUNDMAN, I OHNUMA, N DUPIN et al. An assessment of the entire Al-Fe system including D0₃ ordering. Acta Materialia, 57, 2896-2908(2009).

[71] M LIANG S, R SCHMID-FETZER. Thermodynamic assessment of the Al-Cu-Zn system, part II: Al-Cu binary system. CALPHAD, 51, 252-260(2015).

[72] Y ZHOU C, X CUI J, P GUO C et al. Thermodynamic description of the Al-Ge-Ni system over the whole composition and temperature ranges. CALPHAD, 58, 138-150(2017).

[73] M LI, M DU Z, C GUO et al. Thermodynamic optimization of the Cu-Sn and Cu-Nb-Sn systems. Journal of Alloys and Compounds, 477, 104-117(2009).

[74] R SUBRAMANINA P, E LAUGHLIN D. Cu-W (copper tungsten). Indian Institute of Metals, 12, 76-79(1991).

[75] R ZHAO J, Y DU, J ZHANG L et al. Thermodynamic reassessment of the Cu-V system supported by key experiments. CALPHAD, 32, 252-255(2008).

[76] R WEILAND, F LUPTON D, B FISCHER et al. High-temperature mechanical properties of the platinum group metals. Platinum Metals Review, 50, 158-170(2006).

[77] G GANSKE, E SLAVCHEVA, A VAN OOYEN et al. Sputtered platinum-iridium layers as electrode material for functional electrostimulation. Thin Solid Films, 519, 3965-3970(2011).

[78] F TSENG S, T LEE C, C Huang K et al. Mechanical properties of Pt-Ir and Ni-Ir binary alloys for glass-molding dies coating. Journal of Nanoscience and Nanotechnology, 11, 8682-8688(2011).

[79] Y YI A, A JAIN. Compression molding of aspherical glass lenses-a combined experimental and numerical analysis. Journal of the American Ceramic Society, 88, 579-586(2005).

[80] F KLOCKE, O DAMBON, Y YI A et al. Process Chain for the Replication of Complex Optical Glass Components. Berlin Heidelberg: Springer, 119-132(2013).

[81] J MA K, H CHIEN H, H CHUAN W et al. Design of protective coatings for glass lens molding. Key Engineering Materials Design of protective coatings for glass lens molding. Key Engineering Materials, 655-661(2008).

[82] F KLOCKE, O DAMBON, K GEORGIADIS et al. Comparison of nitride and noble metal coatings for precision glass molding tools. Key Engineering Materials, 438, 9-6(2010).

[83] K BOBZIN, N BAGCIVAN, M EWERING et al. Influence of interlayer thickness of a thin noble metal MSIP-PVD coating on compound and system properties for glass lens moulding. Production Engineering, 6, 311-318(2012).

[84] K BOBZIN, N BAGCIVAN, T BRÖGELMANN et al. Development and qualification of a MSIP PVD iridium coating for precision glass moulding. Materials Sciences and Application, 44, 673-678(2013).

[85] A SAKSENA, C CHIEN Y, K CHANG K et al. Metastable phase formation of Pt-X (X= Ir, Au) thin flms. Scientific Reports, 8, 10198(2018).

[86] Y YAMABE-MITARAI, T AOYAGI, T ABE et al. An investigation of phase separation in the Ir-Pt binary system. Journal of Alloys and Compounds, 484, 327-334(2009).

[87] N XU X, P REN Y, F LI C et al. Thermodynamic assessment of Au-Pt system. Transactions of Nonferrous Metals Society of China, 22, 1432-1436(2012).