Acta Photonica Sinica, Volume. 48, Issue 4, 416003(2019)
Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering
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WANG Hong-mei, LI Yu-fang, SHEN Hong-lie, ZHAI Zi-hao, CHEN Jie-yi, YANG Jia-le, YANG Yan. Effect of Nitrogen Gas Flow Rate on Properties of Diamond Like Carbon Films Prepared by Magnetron Sputtering[J]. Acta Photonica Sinica, 2019, 48(4): 416003
Paper Information
Received: Nov. 20, 2018
Accepted: --
Published Online: Apr. 28, 2019
The Author Email: Hong-mei WANG (iwhongmei@163.com)
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