[1] [1] HERRERA-FERNANDEZ J M, SANCHEZ-BREA L M. Double diffractive optical element system for near-field shaping［J］. Applied Optics, 2011, 50(23): 4587-4593.

[2] [2] PANG Hui, YIN Shao-yun,DENG Qi-ling, et al. Design method of diffractive optical element with large diffraction angle［C］. International Society for Optics and Photonics, 2014, 9271: 92711M.

[3] [3] LI Bing, YAN Ai-min, DAI En-wen, et al.Simulations of conjugate danmmann grating based on coherent beam combination of two-dimensinal solid state laser array［J］. Acta Optical Sinica, 2016, 32(11): 173-179.

[4] [4] TURUNEN N J, VASARA A,J WESTTHOLM, et al. Optimization and fabrication of beam splitters［J］. Journal of Physics D-Applied Physcis, 1988, 21(10): 92-96.

[5] [5] KILLAT U, RABE G, RAVE W, et al. Binary phase grating for star couples with a hign splitting ratio［J］. Fiber and Integrat Optics, 2006, 4(2): 159-167.

[6] [6] NAKAYA T, QIU Jian-rong, et al. Fabrication of dammann gratings inside glasses by femtosecond laser［J］. Chinese Phsycs Letters, 2004, 21(6): 1061-1063.

[7] [7] ZHOU Chang-he, LIU Li-ren, et al. Numerical study of dammann array illuminators［J］. Applied Optics, 1995, 34(26): 5961-5959.

[8] [8] CHEN Qi, LI Guo-jun, FANG Liang, et al. Design of wide-angle laser beam splitter with sub-wavelength multi-level structure［J］. Chinese Journal of Lasers, 2016, 43(2): 0205006.

[9] [9] PANG Hui, YIN Shao-yun, DENG Qi-ling, et al. A novelmethod for the design of diffractive optical elements based on the Rayleigh-Sommerfeld integral［J］. Optics & Lasers in Engineering, 2015, 70: 38-44.

[10] [10] CHANG Yan-shuo, HSU Wei-fang, HSU Ku-hui, et al. Full-frame projection displays using aliquid crystal on-silicon spatial light modulator for beam shaping and speckle suppression［J］. Applied Optics, 2014, 53(27): 214-221.

[11] [11] ESACHER A, BERNET S, RITSCH-MARTE M. Colour hologram projection with an SLMby exploiting its full phase modulation range［J］. Optics Express, 2014, 22(17): 20530-20541.

[12] [12] LIU Xin, ZHANG Man, PANG Hu, et al. Fabrication of large-angle diffractive optical element based on nanoimprint lithography［J］. Acta Photonica Sinica, 2016, 45(6): 0605001.

[13] [13] YING Chao-fu, PANG Hui, FAN Chang-jiang, et al. New method for the design of a phase-only computer hologram for multiplane reconstruction［J］. Optics Engineering, 2011, 50(5): 055802.

[14] [14] YOO S, SONG H Y, LEE J, et al. Cost-effective large-scale fabrication of diffractive optical elements by using conventional semiconducting processes［J］. Applied Optics, 2012, 51(33): 8052-8056.

[15] [15] JESACHER A, BERNET S, RITSCH M, et al. Colour hologram projection with an SLM by exploiting its full phase modulation range［J］. Optics Express, 2014, 22(17): 20530-20541.