Acta Physica Sinica, Volume. 68, Issue 11, 114201-1(2019)
Figures & Tables(6)
Fig. 1. Schematic diagram of high precision detection system for asymmetric double off-axis aspheric mirror.非对称双面离轴非球面反射镜高精度检测系统示意图
Fig. 2. Optical path figure of zoom null compensation device structure.变焦零位补偿装置结构光路图
Fig. 3. Residual wave aberration map and optical path difference (OPD) aberration curves: (a) Zoom 1; (b) zoom 2.剩余波像差图和光程差曲线 (a)结构一; (b)结构二
Fig. 4. Tolerance analysis results of null compensation detection RMS wave aberration: (a) Zoom 1; (b) zoom 2.零位补偿检测波像差公差分析结果图 (a)结构一; (b)结构二
Table 1. Parameter of asymmetric double-sided off-axis aspheric mirror.
View tableView in ArticleTable 1. Parameter of asymmetric double-sided off-axis aspheric mirror.
表面 A面 B面 表达形式 $x = \dfrac{c{y^2}}{1 \!+\! \sqrt {1{\rm{\! -\! }}\left( {k \!+\! 1} \right){c^2}{y^2}} } \!+\! A{y^4} \!+\! B{y^6} \!+\! C{y^8} \!+\! \cdots $ 曲率半径/mm –1000 –650 偏心量/mm 82.427 57.948 待检面口径/mm 56 39 二次曲面常数( K )–1.5 –3.0 4阶系数( A 面)8.39516×10–11 –9.24425×10–10 6阶系数( B 面)9.36208×10–17 8.12843×10–16
Table 2. Tolerance precision of compensation device
View tableView in ArticleTable 2. Tolerance precision of compensation device
公差项 公差最小值 公差项 公差最小值 曲率半径公差 0.025 mm 安装偏心公差 0.1 mm 厚度公差 0.15 mm 安装倾斜公差 20″ 表面不规则度公差 0.05 λ 折射率公差 0.002 空气间隔公差 0.15 mm
Tools
Get Citation
Copy Citation Text
Shuai Feng, Jun Chang, Ya-Jun Niu, Yu Mu, Xin Liu.
Paper Information
Category:
Received: Dec. 22, 2018
Accepted: --
Published Online: Oct. 30, 2019
The Author Email:
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20