Infrared and Laser Engineering, Volume. 48, Issue 4, 420002(2019)
Design of low stress MEMS cantilever structure with tunable VCSEL
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Pei Lina, Zou Yonggang, Shi Linlin, Wang Xiaolong, Fan Jie, Wang Haizhu. Design of low stress MEMS cantilever structure with tunable VCSEL[J]. Infrared and Laser Engineering, 2019, 48(4): 420002
Paper Information
Received: Dec. 10, 2018
Accepted: Dec. 31, 2018
Published Online: Sep. 21, 2020
The Author Email: Lina Pei (753316970@qq.com)
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