Infrared and Laser Engineering, Volume. 48, Issue 4, 420002(2019)
Design of low stress MEMS cantilever structure with tunable VCSEL
The structural damage caused by micro-electro-mechanical system(MEMS) stress concentration in tunable vertical cavity surface emitting lasers(VCSEL) of GaAs-based and InP-based materials was studied. A bowknot MEMS cantilever structure was designed to reduce the von Mises stress at the fixed end of the cantilever and ensure the reliability of the device while ensuring the maximum displacement was invariable. The COMSOL software was used to optimize and analyze the influence of various parameters of the bowknot cantilever structure on the mechanical properties. The results show that the maximum von Mises stress at the fixed end of the optimized bowknot MEMS cantilever structure is reduced by 64% compared to the equal-section cantilever structure. The free spectral range of a bowknot MEMS wavelength-tunable VCSEL for GaAs-based materials is up to 45 nm.
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Pei Lina, Zou Yonggang, Shi Linlin, Wang Xiaolong, Fan Jie, Wang Haizhu. Design of low stress MEMS cantilever structure with tunable VCSEL[J]. Infrared and Laser Engineering, 2019, 48(4): 420002
Received: Dec. 10, 2018
Accepted: Dec. 31, 2018
Published Online: Sep. 21, 2020
The Author Email: Lina Pei (753316970@qq.com)