Effect of Alignment Errors on Surface Measurements of Flat Mirror Deflectometry

Mengyang Li; Xiaodong Yuan; Tingfen Cao; Dahai Li; Changchun Liu; Jinli Zhang; Zhao Xiong; Haiping Chen; Xusong Quan; Congzhi Yi; Huan Luo

doi:10.3788/AOS201939.0812001

Acta Optica Sinica, Volume. 39, Issue 8, 0812001(2019)

Effect of Alignment Errors on Surface Measurements of Flat Mirror Deflectometry

Mengyang Li¹, Xiaodong Yuan^1、*, Tingfen Cao¹, Dahai Li², Changchun Liu¹, Jinli Zhang¹, Zhao Xiong¹, Haiping Chen¹, Xusong Quan¹, Congzhi Yi¹, and Huan Luo¹

Author Affiliations

¹ Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China

² School of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610065, China

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[13] Chen P Y, Li D H, Wang Q H et al. A method of sub-aperture slope stitching for testing flat element based on phase measuring deflectometry[J]. Optics and Lasers in Engineering, 110, 392-400(2018). http://www.onacademic.com/detail/journal_1000040426826210_71c5.html

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Mengyang Li, Xiaodong Yuan, Tingfen Cao, Dahai Li, Changchun Liu, Jinli Zhang, Zhao Xiong, Haiping Chen, Xusong Quan, Congzhi Yi, Huan Luo. Effect of Alignment Errors on Surface Measurements of Flat Mirror Deflectometry[J]. Acta Optica Sinica, 2019, 39(8): 0812001

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Dec. 18, 2018

Accepted: Apr. 15, 2019

Published Online: Aug. 7, 2019

The Author Email: Yuan Xiaodong (yxd66my@163.com)

DOI:10.3788/AOS201939.0812001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology