Optics and Precision Engineering, Volume. 31, Issue 11, 1607(2023)
High-accuracy laser spatial alignment and stabilization system with error separation technology
Figures & Tables(9)
Fig. 1. Laser stabilization system with error separation technology
Fig. 5. Measurement results of beam jitters before applying stabilization system
Fig. 6. Measurement results of beam jitters after applying laser stabilization system based on error separation technique
Fig. 7. Measurement results of beam jitters after applying MRC laser stabilization system
Fig. 8. Measurement results of beam jitters after applying TEM laser stabilization system
Table 1. Measurement results of beam jitters after applying laser stabilization systems
View tableView in ArticleTable 1. Measurement results of beam jitters after applying laser stabilization systems
稳定系统 外部扰动 位置控制精度/μm 角度控制精度/μrad STDX STDY STDα STDβ 无 无 0.844 0.849 2.294 3.090 有 4.404 4.306 5.162 6.812 本文系统 无 0.143 0.167 0.753 0.553 有 0.275 0.244 0.819 0.601 MRC 无 0.346 0.386 1.950 1.880 有 0.779 0.468 1.764 2.210 TEM 无 0.307 0.483 1.087 1.190 有 0.377 0.523 1.106 1.217
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Chengpeng MA, Mengbo TANG, Qi SUN, Qiuyuan SUN, Chenliang DING, Cuifang KUANG. High-accuracy laser spatial alignment and stabilization system with error separation technology[J]. Optics and Precision Engineering, 2023, 31(11): 1607
Paper Information
Category: Modern Applied Optics
Received: Nov. 11, 2022
Accepted: --
Published Online: Jul. 4, 2023
The Author Email: DING Chenliang (dingcl@zhejianglab.com), KUANG Cuifang (cfkuang@zju.edu.cn)
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