Optics and Precision Engineering, Volume. 31, Issue 11, 1607(2023)

High-accuracy laser spatial alignment and stabilization system with error separation technology

Chengpeng MA1... Mengbo TANG1, Qi SUN1, Qiuyuan SUN1, Chenliang DING1,*, and Cuifang KUANG1,23,* |Show fewer author(s)
Author Affiliations
  • 1Research Center for Intelligent Chips and Devices, Zhejiang Laboratory, Hangzhou30023, China
  • 2State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou31007, China
  • 3State Key Laboratory of Extreme Photonics and Instrumentation, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou11200, China
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    The laser beam stabilization system facilitates high-precision correction of the laser beam via the control of the beam position and angle, providing long-term stability. It plays an important role in micro/nano-laser direct writing and super-resolution imaging. In this paper, a miniaturized laser stabilization system with error separation technology, which eliminates the coupling error caused by traditional dual-mirror controlling and improves the performance of laser beam stabilization control, is proposed. Comparative experiments indicate that the laser stabilization system based on this method stabilized the beam position with an accuracy better than 0.3 µm (RMS) and stabilized the angle with an accuracy better than 1 µrad (RMS). The results of test experiments with active disturbance indicate that the system maintained the same performance. Compared with two commercial laser stabilization systems under the same conditions, the proposed system can yield 50% lower position and angle jitter.

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    Chengpeng MA, Mengbo TANG, Qi SUN, Qiuyuan SUN, Chenliang DING, Cuifang KUANG. High-accuracy laser spatial alignment and stabilization system with error separation technology[J]. Optics and Precision Engineering, 2023, 31(11): 1607

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    Paper Information

    Category: Modern Applied Optics

    Received: Nov. 11, 2022

    Accepted: --

    Published Online: Jul. 4, 2023

    The Author Email: DING Chenliang (dingcl@zhejianglab.com), KUANG Cuifang (cfkuang@zju.edu.cn)

    DOI:10.37188/OPE.20233111.1607

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