Molybdenum thin films fabricated by rf and dc sputtering for Cu(In,Ga)Se<sub>2</sub> solar cell applications

Beibei Guo; Yaoming Wang; Xiaolong Zhu; Mingsheng Qin; Dongyun Wan; Fuqiang Huang

doi:10.3788/COL201614.043101

Chinese Optics Letters, Volume. 14, Issue 4, 043101(2016)

Molybdenum thin films fabricated by rf and dc sputtering for Cu(In,Ga)Se₂ solar cell applications

Beibei Guo¹, Yaoming Wang², Xiaolong Zhu², Mingsheng Qin², Dongyun Wan^1、*, and Fuqiang Huang²

Author Affiliations

¹School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

²CAS Key Laboratory of Materials for Energy Conversion, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China

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Figures & Tables(6)

Fig. 1. XRD patterns of as-deposited Mo films prepared by dc and rf magnetron sputtering, respectively, as a function of the supplied power.

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Fig. 2. SEM images of the Mo films prepared by dc and rf magnetron sputtering, respectively, with different supplied powers: (a) rf 80 W, (b) rf 100 W, (c) rf 120 W, (d) dc 80 W, (e) dc 100 W, and (f) dc 120 W.

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Fig. 3. AFM images of the Mo films prepared by dc and rf magnetron sputtering, respectively, with different supplied powers, revealing the differences in grain size and morphology: (a) rf 80 W, (b) rf 100 W, (c) rf 120 W, (d) dc 80 W, (e) dc 100 W, and (f) dc 120 W.

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Fig. 4. Cross-sectional SEM images of the Mo films deposited at 100 and 120 W by rf and dc sputtering, respectively: (a) rf 100 W, (b) dc 100 W, (c) rf 120 W, (d) dc 120 W. (e) Bright-field TEM micrograph from the dc-120 W Mo film.

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Fig. 5. (a) SEM cross-sectional image of the glass/Mo/CIGS sample after selenization, (b) I-V characteristic of the CIGS solar cells.

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Table 1. Structural and Electrical Properties of the As-Deposited Mo Films

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Table 1. Structural and Electrical Properties of the As-Deposited Mo Films

Sample	CPS	FWHM $(2 θ)$	Grain Size from AFM (nm)	Thickness (μm)	Roughness (Å)	$R (Ω / sq)$	$ρ$ $(μΩ \cdot cm)$
dc-80 W	471.6	0.559	37.5	0.92	22.3	0.31	63.7
dc-100 W	1041.2	0.409	68.7	1.38	49.6	0.23	28.1
dc-120 W	1620.6	0.280	158.3	1.85	162	0.14	10.2
rf-80 W	150.8	1.013	22.7	0.78	20.8	0.47	102.9
rf-100 W	688.9	0.442	42.1	1.13	26.6	0.38	56.6
rf-120 W	1059.4	0.401	70.6	1.42	50.3	0.24	27.8

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Beibei Guo, Yaoming Wang, Xiaolong Zhu, Mingsheng Qin, Dongyun Wan, Fuqiang Huang. Molybdenum thin films fabricated by rf and dc sputtering for Cu(In,Ga)Se₂ solar cell applications[J]. Chinese Optics Letters, 2016, 14(4): 043101

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Paper Information

Category: Thin films

Received: Oct. 31, 2015

Accepted: Feb. 4, 2016

Published Online: Aug. 6, 2018

The Author Email: Dongyun Wan (echowandy@shu.edu.cn)

DOI:10.3788/COL201614.043101

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology