Opto-Electronic Engineering, Volume. 33, Issue 1, 1(2006)
Imaging interferometric lithography with bidirection biased illumination
[5] [5] Xiaolan CHEN,S.R.J.BRUECK.Imaging interferometric lithography for arbitrary patterns[J].SPIE Proceedings,1997,3331:214-224.
[6] [6] S.R.J.BRUECK.Imaging interferometric lithography[J].Microlithography World,1998,Winter:2-10.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Imaging interferometric lithography with bidirection biased illumination[J]. Opto-Electronic Engineering, 2006, 33(1): 1