Opto-Electronic Engineering, Volume. 33, Issue 1, 1(2006)

Imaging interferometric lithography with bidirection biased illumination

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    References(2)

    [5] [5] Xiaolan CHEN,S.R.J.BRUECK.Imaging interferometric lithography for arbitrary patterns[J].SPIE Proceedings,1997,3331:214-224.

    [6] [6] S.R.J.BRUECK.Imaging interferometric lithography[J].Microlithography World,1998,Winter:2-10.

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    [in Chinese], [in Chinese], [in Chinese]. Imaging interferometric lithography with bidirection biased illumination[J]. Opto-Electronic Engineering, 2006, 33(1): 1

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    Paper Information

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    Received: Oct. 18, 2005

    Accepted: --

    Published Online: Nov. 14, 2007

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