Chinese Optics Letters, Volume. 10, Issue 1, 013104(2012)

Dependence of wavefront errors on nonuniformity of thin films

Hongji Qi, Meiping Zhu, Weili Zhang, Kui Yi, Hongbo He, and Jianda Shao
References(9)

[1] [1] W. Williams, "NIF large optics metrology software: description and algorithms," (Lawrence Livermore National Laboratory (LLNL), Livermore, CA, 2002).

[2] [2] J. R. Piascik, J. Y. Thompson, C. A. Bower, and B. R. Stoner, J. Vacuum Sci. & Technol. A 23, 1419 (2005).

[3] [3] M. Niibe, H. Nii, and Y. Sugie, Jpn. J. Appl. Phys. 41, 3069 (2002).

[4] [4] D. W. Reicher and S. A. McCormack, Proc. SPIE 4091, 104 (2000).

[5] [5] Q. Xiao, H. He, S. Shao, J. Shao, and Z. Fan, Thin Solid Films 517, 4295 (2009).

[6] [6] Y. Wang, Y. Zhang, W. Chen, W. Shen, X. Liu, and P. Gu, Appl. Opt. 47, C319 (2008).

[7] [7] J. Ramsay and P. Ciddor, Appl. Opt. 6, 2003 (1967).

[8] [8] R. Knowlden, Proc. SPIE 288, 78 (1981).

[9] [9] H. A. Macleod, Thin-Film Optical Filters (3rd ed.); (Institute of Physics Pub., Philadelphia, 2001).

Cited By
Tools

Get Citation

Copy Citation Text

Hongji Qi, Meiping Zhu, Weili Zhang, Kui Yi, Hongbo He, Jianda Shao. Dependence of wavefront errors on nonuniformity of thin films[J]. Chinese Optics Letters, 2012, 10(1): 013104

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category:

Received: Apr. 2, 2011

Accepted: May. 13, 2011

Published Online: Sep. 21, 2011

The Author Email:

DOI:10.3788/col201210.013104

Topics